发明申请
- 专利标题: PHOTORESIST COMPOSITION, METHOD OF PATTERNING THIN FILM USING THE SAME, AND METHOD OF MANUFACTURING LIQUID CRYSTAL DISPLAY PANEL USING THE SAME
- 专利标题(中): 光电组合物,使用该薄膜的薄膜的方法以及使用其制造液晶显示面板的方法
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申请号: US11562714申请日: 2006-11-22
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公开(公告)号: US20070190454A1公开(公告)日: 2007-08-16
- 发明人: Hi Kuk LEE , Byung Uk KIM , Hyoc Min YOUN , Joo Pyo YUN , Woo Seok JEON
- 申请人: Hi Kuk LEE , Byung Uk KIM , Hyoc Min YOUN , Joo Pyo YUN , Woo Seok JEON
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2006-0013925 20060214
- 主分类号: G03C1/00
- IPC分类号: G03C1/00
摘要:
A photoresist composition capable of forming a high resolution pattern without an additional heating process includes an alkali-soluble phenol polymer in an amount of 10 to 70 parts by weight, including at least one unit of Formula 1, a photo-acid generator in an amount of 0.5 to 10 parts by weight, a dissolution inhibitor in an amount of 5 to 50 parts by weight, including at least one unit of Formula 2, and a solvent in an amount of 10 to 90 parts by weight, wherein the amounts of the foregoing components is based on a total of 100 parts by weight of alkali-soluble phenol polymer, photo-acid generator, dissolution inhibitor, and solvent, and wherein Formulas 1 and 2 have the structures: wherein R is a methyl group, wherein R1, R2 and R3 are the same or different and are hydrogen or t-butyl vinyl ether protective groups.
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