发明申请
- 专利标题： Coaxial imaging for indentation instruments
- 专利标题（中）： 压痕仪的同轴成像
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申请号： US11708302申请日： 2007-02-20
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公开(公告)号： US20070193346A1公开(公告)日： 2007-08-23
- 发明人: Wayne A. Bonin
- 申请人： Wayne A. Bonin
- 主分类号： G01N3/48
- IPC分类号： G01N3/48
摘要：
Modifications to the indenter probe tips and transducer, and proper selection of optics in an indentation system allow straight down optical viewing of the sample surface under the indentation tip by a microscope, by providing an optical path through the transducer from the sample surface under the tip to a microscope objective, thereby simplifying alignment of the tip to features on the sample.
公开/授权文献
- US07647822B2 Coaxial imaging for indentation instruments 公开/授权日：2010-01-19
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