发明申请
- 专利标题: Composite substrate carrier
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申请号: US11699749申请日: 2007-01-30
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公开(公告)号: US20070193907A1公开(公告)日: 2007-08-23
- 发明人: Sanjiv Bhatt , Shawn Eggum
- 申请人: Sanjiv Bhatt , Shawn Eggum
- 专利权人: Entegris, Inc.
- 当前专利权人: Entegris, Inc.
- 主分类号: B65D85/90
- IPC分类号: B65D85/90 ; B65D85/00 ; B65D85/48
摘要:
A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second different thermoplastic material. One of the operative portion and support portion is overmolded onto the other to form a gapless hermitic interface that securely bonds the portions together. The operative portion may be a transparent window, a portion of a latching mechanism or a wafer contact portion. Preferred embodiments of the invention include wafer carriers with said features, process carriers with said features and a process for manufacturing wafer carriers with said features.
公开/授权文献
- US2652985A Jaw crusher with opposed jaws driven by unbalanced weights 公开/授权日:1953-09-22
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