Invention Application
- Patent Title: Apparatus for measuring numbers of particles and method thereof
- Patent Title (中): 用于测量颗粒数量的装置及其方法
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Application No.: US10597934Application Date: 2005-02-14
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Publication No.: US20070194775A1Publication Date: 2007-08-23
- Inventor: Kang-Ho Ahn
- Applicant: Kang-Ho Ahn
- Applicant Address: KR Seoul 140-030 KR Gyeonggi-do 467-866
- Assignee: Kang-Ho Ahn,Hyundai Calibration & Certification Technologies Co., Ltd.
- Current Assignee: Kang-Ho Ahn,Hyundai Calibration & Certification Technologies Co., Ltd.
- Current Assignee Address: KR Seoul 140-030 KR Gyeonggi-do 467-866
- Priority: KR10-2004-0009492 20040213
- International Application: PCT/KR05/00401 WO 20050214
- Main IPC: G01N27/00
- IPC: G01N27/00

Abstract:
The present invention discloses apparatus and method for rapidly and easily measuring the numbers and size distribution of low concentration particles which exist in a clean space such as a clean room. The apparatus and method according to the present invention measures the numbers of particles by charging particles to a monopolarity, collecting the particles by applying a voltage to an electrode and attaching the charged particles of a certain size or less thereto, separating the charged particles of the certain size or more according to size by the particle separating ducts. The apparatus for measuring the number of particles according to the present invention makes it possible to obtain a size distribution of particles in the air by a single measurement and to rapidly and easily measure it even though the number of the particles in the air is small.
Public/Granted literature
- US07471076B2 Apparatus for measuring numbers of particles and method thereof Public/Granted day:2008-12-30
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