公开(公告)号：US07724368B2

公开(公告)日：2010-05-25

申请号：US12166202

申请日：2008-07-01

申请人： Kang Ho Ahn

发明人： Kang Ho Ahn

IPC分类号： G01N15/02

CPC分类号： G01N15/065

摘要： A condensation particle counter is capable of efficiently measuring the number and size of fine particles. The condensation particle counter includes a saturator, a condenser and an optical particle counters. The saturator is designed to generate a saturated gas by saturating a gas in which fine particles are suspended with working fluid. The condenser is connected to a downstream side of the saturator to condense the saturated gas so that liquid droplets can grow around the fine particles. The optical particle counter is connected to downstream sides of the condenser to optically detect the liquid droplets supplied from the condensers. The condenser has a condenser tube for interconnecting the saturator and the optical particle counter. The present condensation particle counter can use water as working fluid and also can optically measure fine particles in an easy and accurate manner by forming or installing an inner surface of a condenser tube with a hydrophilic tube.

摘要翻译： 冷凝颗粒计数器能够有效地测量细颗粒的数量和尺寸。 冷凝颗粒计数器包括饱和器，冷凝器和光学粒子计数器。 饱和器被设计成通过使工作流体悬浮微细气体的气体饱和来产生饱和气体。 冷凝器连接到饱和器的下游侧以冷凝饱和气体，使得液滴可以围绕细颗粒生长。 光学粒子计数器连接到冷凝器的下游侧，以光学地检测从冷凝器供应的液滴。 冷凝器具有用于互连饱和器和光学粒子计数器的冷凝器管。 本冷凝颗粒计数器可以使用水作为工作流体，并且还可以通过用亲水管形成或安装冷凝管的内表面，以容易和准确的方式光学测量细颗粒。

公开(公告)号：US20090009748A1

公开(公告)日：2009-01-08

申请号：US12166161

申请日：2008-07-01

申请人： KANG HO AHN

发明人： KANG HO AHN

IPC分类号： G01N15/00 ,  G01N15/02

CPC分类号： G01N15/065

摘要： A condensation particle counter is capable of efficiently measuring the number and size of fine particles. The condensation particle counter includes a saturator, a plurality of condensers and a plurality of optical particle counters. The saturator is designed to generate a saturated gas by saturating a gas in which fine particles are suspended with working fluid. The condensers are connected to a downstream side of the saturator to condense the saturated gas so that liquid droplets can grow around the fine particles. The optical particle counters are connected to downstream sides of the condensers to optically detect the liquid droplets supplied from the condensers. Each of the condensers has a condenser tube for interconnecting the saturator and each of the optical particle counters. The condenser tube is provided with a hydrophilic tube installed inside surface of the condenser tube.

摘要翻译： 冷凝颗粒计数器能够有效地测量细颗粒的数量和尺寸。 冷凝颗粒计数器包括饱和器，多个冷凝器和多个光学粒子计数器。 饱和器被设计成通过使工作流体悬浮微细气体的气体饱和来产生饱和气体。 冷凝器连接到饱和器的下游侧以使饱和气体冷凝，使得液滴可以围绕细颗粒生长。 光学粒子计数器连接到冷凝器的下游侧，以光学地检测从冷凝器供应的液滴。 每个冷凝器具有用于互连饱和器和每个光学粒子计数器的冷凝管。 冷凝器管设置有安装在冷凝器管内表面的亲水管。

公开(公告)号：US06471753B1

公开(公告)日：2002-10-29

申请号：US09695245

申请日：2000-10-25

申请人： Kang Ho Ahn ,  Jeong Ho Ahn ,  Sang Hyun Ahn

发明人： Kang Ho Ahn ,  Jeong Ho Ahn ,  Sang Hyun Ahn

IPC分类号： B03C3014

CPC分类号： B03C3/16 ,  B05B5/0255

摘要： A device for collecting dust using highly charged hyperfine liquid droplets formed through an electro-hydrodynamic atomization process is disclosed. In the dust collecting device of this invention, a high voltage is applied to capillaries, set within a dust guide duct and having nozzles at their tips. An electric field is thus formed between the capillaries and the duct, and allows the nozzles to spray highly charged hyperfine liquid droplets. Such liquid droplets absorb dust laden in air, flowing in the duct by suction force of a fan. An electrostatic dust collector is detachably coupled to the duct while being insulated from the duct, and forms an electric field having polarity opposite to that of the highly charged liquid droplets, thus electrostatically collecting and removing the dust absorbed by the highly charged liquid droplets. The dust collecting device of this invention easily and effectively removes fine dust having a size smaller than 0.1 cm. This device is also preferably operable at low cost while achieving a desired dust collection effect, and is collaterally advantageous in that it humidifies discharged air, when water is used as the liquid for atomization of the hyperfine liquid droplets.

摘要翻译： 公开了一种使用通过电动液体动力学雾化工艺形成的高度充电的超细液滴收集灰尘的装置。 在本发明的集尘装置中，将高压施加到毛细管上，设置在尘埃导管内并在其尖端具有喷嘴。 因此，在毛细管和管道之间形成电场，并且允许喷嘴喷射高度带电的超细液滴。 这样的液滴吸收空气中的灰尘，通过风扇的吸力在管道中流动。 静电集尘器与导管绝缘而可拆卸地连接到管道，并且形成具有与高电荷液滴的极性相反的极性的电场，从而静电收集和去除被高电荷液滴吸收的灰尘。 本发明的集尘装置容易且有效地除去尺寸小于0.1cm的细粉尘。 该装置还优选以低成本操作，同时实现期望的集尘效果，并且当水被用作用于雾化超精细液滴的液体时，其加湿排出的空气是相当有利的。

公开(公告)号：US08072598B2

公开(公告)日：2011-12-06

申请号：US12166161

申请日：2008-07-01

申请人： Kang Ho Ahn

发明人： Kang Ho Ahn

IPC分类号： G01N21/00

CPC分类号： G01N15/065

摘要： A condensation particle counter is capable of efficiently measuring the number and size of fine particles. The condensation particle counter includes a saturator, a plurality of condensers and a plurality of optical particle counters. The saturator is designed to generate a saturated gas by saturating a gas in which fine particles are suspended with working fluid. The condensers are connected to a downstream side of the saturator to condense the saturated gas so that liquid droplets can grow around the fine particles. The optical particle counters are connected to downstream sides of the condensers to optically detect the liquid droplets supplied from the condensers. Each of the condensers has a condenser tube for interconnecting the saturator and each of the optical particle counters. The condenser tube is provided with a hydrophilic tube installed inside surface of the condenser tube.

摘要翻译： 冷凝颗粒计数器能够有效地测量细颗粒的数量和尺寸。 冷凝颗粒计数器包括饱和器，多个冷凝器和多个光学粒子计数器。 饱和器被设计成通过使工作流体悬浮微细气体的气体饱和来产生饱和气体。 冷凝器连接到饱和器的下游侧以使饱和气体冷凝，使得液滴可以围绕细颗粒生长。 光学粒子计数器连接到冷凝器的下游侧，以光学地检测从冷凝器供应的液滴。 每个冷凝器具有用于互连饱和器和每个光学粒子计数器的冷凝管。 冷凝器管设置有安装在冷凝器管内表面的亲水管。

公开(公告)号：US20090009749A1

公开(公告)日：2009-01-08

申请号：US12166202

申请日：2008-07-01

申请人： KANG HO AHN

发明人： KANG HO AHN

IPC分类号： G01N15/00 ,  G01N15/02

CPC分类号： G01N15/065

摘要： A condensation particle counter is capable of efficiently measuring the number and size of fine particles. The condensation particle counter includes a saturator, a condenser and an optical particle counters. The saturator is designed to generate a saturated gas by saturating a gas in which fine particles are suspended with working fluid. The condenser is connected to a downstream side of the saturator to condense the saturated gas so that liquid droplets can grow around the fine particles. The optical particle counter is connected to downstream sides of the condenser to optically detect the liquid droplets supplied from the condensers. The condenser has a condenser tube for interconnecting the saturator and the optical particle counter. The present condensation particle counter can use water as working fluid and also can optically measure fine particles in an easy and accurate manner by forming or installing an inner surface of a condenser tube with a hydrophilic tube.

摘要翻译： 冷凝颗粒计数器能够有效地测量细颗粒的数量和尺寸。 冷凝颗粒计数器包括饱和器，冷凝器和光学粒子计数器。 饱和器被设计成通过使工作流体悬浮微细气体的气体饱和来产生饱和气体。 冷凝器连接到饱和器的下游侧以冷凝饱和气体，使得液滴可以围绕细颗粒生长。 光学粒子计数器连接到冷凝器的下游侧以光学地检测从冷凝器供应的液滴。 冷凝器具有用于互连饱和器和光学粒子计数器的冷凝器管。 本冷凝颗粒计数器可以使用水作为工作流体，并且还可以通过用亲水管形成或安装冷凝管的内表面，以容易和准确的方式光学测量细颗粒。

公开(公告)号：US20080280068A1

公开(公告)日：2008-11-13

申请号：US11908663

申请日：2006-03-14

申请人： Kang-Ho Ahn

发明人： Kang-Ho Ahn

IPC分类号： B05D1/00 ,  B01J19/12 ,  B01J19/08

CPC分类号： B01J4/002 ,  B01J19/087 ,  B01J19/088 ,  B01J19/121 ,  B01J19/123 ,  B01J19/125 ,  B01J19/128 ,  B01J2219/0849 ,  B01J2219/0869 ,  B01J2219/0871 ,  B01J2219/0875 ,  B01J2219/0886 ,  B82Y10/00 ,  B82Y30/00

摘要： An ultra-fine particle manufacturing apparatus and method is capable of producing nanometer-sized ultra-fine particles from reaction gases with high energy light beams, corona discharge and an electric field. High energy light beams are irradiated into a chamber of a housing through the use of a high energy light source. Reaction gases are supplied from a reaction gas supply device to a reaction gas inlet tube. The reaction gases are then introduced through the reaction gas inlet tube into the chamber of the housing to produce a large quantity of ultra-fine particles through the reaction of the reaction gases with the high energy light beams. A voltage is applied to the reaction gas inlet tube by means of a power supply device. The ultra-fine particles flowing within the chamber of the housing are collected by means of a collecting plate.

摘要翻译： 超细颗粒制造装置和方法能够从具有高能量光束，电晕放电和电场的反应气体制造纳米级超细颗粒。 通过使用高能量光源将高能量光束照射到壳体的腔室中。 反应气体从反应气体供给装置供给到反应气体导入管。 然后将反应气体通过反应气体入口管引入壳体的室中，以通过反应气体与高能量光束的反应产生大量的超细颗粒。 通过电源装置向反应气体入口管施加电压。 在壳体的室内流动的超细颗粒通过收集板收集。

公开(公告)号：US20060163380A1

公开(公告)日：2006-07-27

申请号：US10544915

申请日：2004-02-10

申请人： Kang-Ho Ahn

发明人： Kang-Ho Ahn

IPC分类号： B05C1/00

CPC分类号： B05B7/0012 ,  B01J2/04

摘要： The present invention relates to a high flow particles atomizer for atomizing a liquid and drying atomized particles to produce the atomized particles at high flow rate. The atomizer of the present invention comprises a container for containing liquid to be atomized, a nozzle positioned at the center above a liquid surface of the liquid contained in the container for injecting a large amount of gas, a liquid supply device for supplying the liquid into the gas injected by the nozzle, and an atomized particle discharge tube communicating with the container for allowing atomized particles injected by the nozzle to be discharged to the outside of the container. In addition, the atomizer further comprises a drying device for drying the atomized particles discharged through the atomized particle discharge tube.

摘要翻译： 本发明涉及一种用于雾化液体并干燥雾化颗粒以高流速产生雾化颗粒的高流量颗粒雾化器。 本发明的雾化器包括用于容纳待雾化的液体的容器，位于容纳在容器中的用于喷射大量气体的液体的液面上方的中心的喷嘴，用于将液体供给的液体供给装置 由喷嘴喷射的气体和与容器连通的雾化粒子排出管，用于使由喷嘴喷射的雾化粒子排出到容器的外部。 此外，雾化器还包括用于干燥通过雾化粒子排出管排出的雾化粒子的干燥装置。

公开(公告)号：US20060151113A1

公开(公告)日：2006-07-13

申请号：US10562158

申请日：2004-06-24

申请人： Kang-Ho Ahn

发明人： Kang-Ho Ahn

IPC分类号： H01L21/306 ,  F16K15/00 ,  B05C11/00 ,  C23C16/00

CPC分类号： G05D7/0635 ,  Y10T137/7722 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8326

摘要： Provided is apparatus for controlling flow rate of gases used in semiconductor device by differential pressure by generating differential pressure in a fluid path. A differential pressure generation element generates pressure difference in the fluid path of gases used in semiconductor device fabrication, a pressure, sensor which is installed at a bypass of the fluid path detects the pressure difference, and a central processing unit (CPU) measures and controls a flow rate of the gases, thereby the present invention is capable of controlling the flow rate precisely and rapidly, and enhancing the degree of purity of the gases by the filtering function of the differential pressure generation element itself.

摘要翻译： 提供了一种通过在流体路径中产生差压来通过差压来控制在半导体器件中使用的气体的流量的装置。 差压发生元件在半导体器件制造中使用的气体的流体路径中产生压力差，安装在流体路径的旁路处的压力传感器检测压力差，并且中央处理单元（CPU）测量和控制 气体的流量，因此本发明能够通过差压发生元件本身的过滤功能，精确而快速地控制流量，并且提高气体的纯度。

公开(公告)号：US20060072278A1

公开(公告)日：2006-04-06

申请号：US10534585

申请日：2002-11-12

申请人： Kang-Ho Ahn ,  Jeong-Ho Ahn ,  Sang-Hyun Ahn

发明人： Kang-Ho Ahn ,  Jeong-Ho Ahn ,  Sang-Hyun Ahn

IPC分类号： H02H1/04

CPC分类号： B01J19/088 ,  B01J12/002 ,  B01J2219/00146 ,  B01J2219/0811 ,  B01J2219/083 ,  B01J2219/0849 ,  B01J2219/0871 ,  B01J2219/0883 ,  B01J2219/0894 ,  B03C3/38 ,  B03C3/41 ,  B03C2201/10 ,  C01G1/00 ,  C01G1/02 ,  C01G49/02 ,  H05H1/48 ,  H05H2001/483

摘要： An apparatus and method for manufacturing particles using corona discharge is disclosed. A discharge electrode is provided within a guide duct and reaction gases are supplied into the guide duct. A high voltage is applied to the discharge electrode and a low voltage is applied to the guide duct to generate a voltage difference therebetween. When heat energy is applied to the reaction gases, chemical reactions occur in the gases and particles are made by the chemical reactions. The particles form new particles centering around ions as nuclei which are generated by corona discharge and moves along the guide duct. A collecting plate positioned in front of the guide duct collects the particles.

摘要翻译： 公开了一种使用电晕放电制造颗粒的装置和方法。 放电电极设置在导管内，反应气体被供应到导管中。 向放电电极施加高电压，向引导管施加低电压，从而在它们之间产生电压差。 当对反应气体施加热能时，化学反应发生在气体中，颗粒是通过化学反应制成的。 颗粒形成以离子为中心的新颗粒，作为核，其通过电晕放电产生并沿着导管移动。 位于导管前方的收集板收集颗粒。

公开(公告)号：US06980284B2

公开(公告)日：2005-12-27

申请号：US10381251

申请日：2001-09-20

申请人： Kang-Ho Ahn ,  Sang-Soo Kim ,  Hae-Young Jeong

发明人： Kang-Ho Ahn ,  Sang-Soo Kim ,  Hae-Young Jeong

IPC分类号： H01L21/02 ,  G01N15/00 ,  G01N15/06 ,  G01N15/14 ,  G01N1/00

CPC分类号： G01N15/065 ,  G01N15/14 ,  G01N2015/0049 ,  G01N2015/0681

摘要： A condensation particle counter measures the number of ultra-fine particles by growing the ultra-fine particles through a condensing process. The counter includes a capillary in which vapor of operating liquid is condensed and the ultra-fine particles grow. An insulating material surrounds the capillary to shut out heat flow between the capillary and the environment. The condensation particle counter can use various operating liquids including alcohol and water, and can be also applied to semiconductor clean rooms.

摘要翻译： 冷凝颗粒计数器通过冷凝过程生长超细颗粒来测量超细颗粒的数量。 计数器包括毛细管，其中工作液体的蒸气被冷凝并且超细颗粒生长。 绝缘材料围绕毛细管以截断毛细管和环境之间的热流。 冷凝颗粒计数器可以使用各种操作液体，包括酒精和水，也可以应用于半导体洁净室。