- 专利标题: Silicon carbide semiconductor device having junction field effect transistor and method for manufacturing the same
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申请号: US11785276申请日: 2007-04-17
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公开(公告)号: US20070200117A1公开(公告)日: 2007-08-30
- 发明人: Rajesh Kumar , Andrei Mihaila , Florin Udrea
- 申请人: Rajesh Kumar , Andrei Mihaila , Florin Udrea
- 申请人地址: JP Kariya-city
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 当前专利权人地址: JP Kariya-city
- 优先权: JP2003-385094 20031114
- 主分类号: H01L31/0312
- IPC分类号: H01L31/0312
摘要:
A silicon carbide semiconductor device includes a substrate and a junction field effect transistor. The transistor includes: a first semiconductor layer disposed on the substrate; a first gate layer disposed on a surface of the first semiconductor layer; a first channel layer adjacent to the first gate layer on the substrate; a first source layer connecting to the first channel layer electrically; a second gate layer adjacent to the first channel layer to sandwich the first channel layer; a second channel layer adjacent to the second gate layer to sandwich the second gate layer; a third gate layer adjacent to the second channel layer to sandwich the second channel layer; and a second source layer connecting to the second channel layer electrically.
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