发明申请
US20070200549A1 Micro-electromechanical system (MEMS) based current and magnetic field sensor
有权
基于微机电系统（MEMS）的电流和磁场传感器
- 专利标题： Micro-electromechanical system (MEMS) based current and magnetic field sensor
- 专利标题（中）： 基于微机电系统（MEMS）的电流和磁场传感器
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申请号： US11356332申请日： 2006-02-16
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公开(公告)号： US20070200549A1公开(公告)日： 2007-08-30
- 发明人: Ertugrul Berkcan , Shankar Chandrasekaran
- 申请人： Ertugrul Berkcan , Shankar Chandrasekaran
- 主分类号： G01R15/18
- IPC分类号： G01R15/18
摘要：
A micro-electromechanical system (MEMS) current and magnetic field sensor for sensing a magnetic field produced by a conductor includes a magneto-MEMS component for sensing the magnetic field and an interference-MEMS component for sensing an interference, wherein the magneto-MEMS component and the interference MEMS component are used to provide an indication of the current in the conductor.