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公开(公告)号：US20130079667A1
公开(公告)日：2013-03-28
申请号：US13247107
申请日：2011-09-28
CPC分类号： G01F1/3272 , A61B5/087 , A61B5/0878 , A61B5/7235 , A61B2562/028 , A61M16/0051 , A61M16/0069 , A61M16/021 , A61M16/16 , A61M2016/0027 , A61M2016/0039 , G01F1/3245 , G01F1/3254 , G01F1/329 , G01F1/72 , Y10T29/49826
摘要： A flow sensor assembly, snore detection assembly, and methods for fabricating the same. The flow sensor assembly includes a flow conduit for fluid flow, a flow disrupter for imparting a disturbance to the fluid flow, a first sensor responsive to the disturbance of the fluid flow and configured to generate signals responsive to the disturbance of the fluid flow, and a processor for determining a flow rate for the fluid flow through the flow conduit based on a first algorithm determining an amplitude of the fluid flow in a first flow regime and a second algorithm determining a frequency of the fluid flow in a second flow regime.
摘要翻译： 流量传感器组件，打鼾检测组件及其制造方法。 流量传感器组件包括用于流体流动的流动管道，用于对流体流动产生干扰的流动扰流器，响应于流体流动干扰并被配置为产生响应于流体流动扰动的信号的第一传感器，以及 基于确定第一流动状态中的流体流动的振幅的第一算法和确定第二流动状态中的流体流动频率的第二算法，确定流过流道的流体流量的处理器。
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2.发明申请Micro-electromechanical system (MEMS) based current and magnetic field sensor 有权基于微机电系统（MEMS）的电流和磁场传感器公开(公告)号：US20070200549A1
公开(公告)日：2007-08-30
申请号：US11356332
申请日：2006-02-16
IPC分类号： G01R15/18
CPC分类号： G01R15/148
摘要： A micro-electromechanical system (MEMS) current and magnetic field sensor for sensing a magnetic field produced by a conductor includes a magneto-MEMS component for sensing the magnetic field and an interference-MEMS component for sensing an interference, wherein the magneto-MEMS component and the interference MEMS component are used to provide an indication of the current in the conductor.
摘要翻译： 用于感测由导体产生的磁场的微机电系统（MEMS）电流和磁场传感器包括用于感测磁场的磁MEMS组件和用于感测干扰的干涉MEMS组件，其中磁MEMS组件 并且使用干涉MEMS分量来提供导体中的电流的指示。
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3.发明授权Micro-electromechanical system (MEMS) based current and magnetic field sensor having improved sensitivities 有权基于微机电系统（MEMS）的电流和磁场传感器具有改进的灵敏度公开(公告)号：US07221144B2
公开(公告)日：2007-05-22
申请号：US11289910
申请日：2005-11-30
申请人： Ertugrul Berkcan , Shankar Chandrasekaran , Christopher James Kapusta , Laura Jean Meyer , Glenn Scott Claydon , Debbie Gahaton Jones , Anis Zribi
发明人： Ertugrul Berkcan , Shankar Chandrasekaran , Christopher James Kapusta , Laura Jean Meyer , Glenn Scott Claydon , Debbie Gahaton Jones , Anis Zribi
IPC分类号： G01R31/00
CPC分类号： G01R15/207 , G01R15/148 , G01R33/0283 , G01R33/0286 , G01R35/005 , Y10T29/49002
摘要： A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.
摘要翻译： 基于微机电系统（MEMS）的电流和磁场传感器包括基于MEMS的磁场感测部件，包括硅衬底的结构部件和包括选自二氧化硅和氮化硅的材料的柔性层， 耦合到所述结构部件以提供所述磁场的机械指示的磁 - 机械转换器，以及耦合到所述结构部件以感测所述机械指示并且提供所述载流导体中的电流的指示的应变响应部件 回应。
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4.发明授权Micro-electromechanical system (MEMS) based current and magnetic field sensor 有权基于微机电系统（MEMS）的电流和磁场传感器公开(公告)号：US07705583B2
公开(公告)日：2010-04-27
申请号：US12251896
申请日：2008-10-15
IPC分类号： G01R31/00
CPC分类号： G01R15/148
摘要： A micro-electromechanical system (MEMS) current and magnetic field sensor for sensing a magnetic field produced by a conductor includes a magneto-MEMS component for sensing the magnetic field and an interference-MEMS component for sensing an interference, wherein the magneto-MEMS component and the interference MEMS component are used to provide an indication of the current in the conductor.
摘要翻译： 用于感测由导体产生的磁场的微机电系统（MEMS）电流和磁场传感器包括用于感测磁场的磁MEMS组件和用于感测干扰的干涉MEMS组件，其中磁MEMS组件 并且使用干涉MEMS分量来提供导体中的电流的指示。
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5.发明申请MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT AND MAGNETIC FIELD SENSOR 有权微电子系统（MEMS）基于电流和磁场传感器公开(公告)号：US20090033314A1
公开(公告)日：2009-02-05
申请号：US12251896
申请日：2008-10-15
IPC分类号： G01R19/00
CPC分类号： G01R15/148
摘要： A micro-electromechanical system (MEMS) current and magnetic field sensor for sensing a magnetic field produced by a conductor includes a magneto-MEMS component for sensing the magnetic field and an interference-MEMS component for sensing an interference, wherein the magneto-MEMS component and the interference MEMS component are used to provide an indication of the current in the conductor.
摘要翻译： 用于感测由导体产生的磁场的微机电系统（MEMS）电流和磁场传感器包括用于感测磁场的磁MEMS组件和用于感测干扰的干涉MEMS组件，其中磁MEMS组件 并且使用干涉MEMS分量来提供导体中的电流的指示。
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公开(公告)号：US20110166800A1
公开(公告)日：2011-07-07
申请号：US12683474
申请日：2010-01-07
IPC分类号： G01F1/00
摘要： A flow sensor assembly is provided and includes a flow conduit configured to impart a disturbance to a flow, multiple sensors disposed at respective sensing locations along the flow conduit. Each sensor is responsive to the disturbance of the flow and generates a corresponding response signal. The flow sensor assembly further includes a processor operably connected to each sensor, the processor being configured to compute a cross-correlation function between the response signals generated by said sensors, and determine a flow rate and a direction for the flow through the conduit based on the computed cross-correlation function. Additional flow sensor assembly arrangements are also disclosed.
摘要翻译： 提供了一种流量传感器组件，并且包括配置成对流动造成干扰的流动管道，设置在沿着流动管道的各个感测位置处的多个传感器。 每个传感器响应于流动的干扰并产生相应的响应信号。 所述流量传感器组件还包括可操作地连接到每个传感器的处理器，所述处理器被配置为计算由所述传感器产生的所述响应信号之间的互相关函数，并且基于所述传感器确定流速和通过所述导管的流动的方向 计算的互相关函数。 还公开了附加的流量传感器组件装置。
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7.发明授权Micro-electromechanical system (MEMS) based current and magnetic field sensor having improved sensitivities 有权基于微机电系统（MEMS）的电流和磁场传感器具有改进的灵敏度公开(公告)号：US07508189B2
公开(公告)日：2009-03-24
申请号：US11733896
申请日：2007-04-11
申请人： Ertugrul Berkcan , Shankar Chandrasekaran , Christopher James Kapusta , Laura Jean Meyer , Glenn Scott Claydon , Debbie Gahaton Jones , Anis Zribi
发明人： Ertugrul Berkcan , Shankar Chandrasekaran , Christopher James Kapusta , Laura Jean Meyer , Glenn Scott Claydon , Debbie Gahaton Jones , Anis Zribi
IPC分类号： G01R31/00
CPC分类号： G01R15/207 , G01R15/148 , G01R33/0283 , G01R33/0286 , G01R35/005 , Y10T29/49002
摘要： A micro-electromechanical system current and magnetic field sensor is presented. The micro-electromechanical system current and magnetic field sensor is configured to sense a magnetic field produced by a current carrying conductor. The sensor includes a structural component comprising a substrate and a compliant layer, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field. The sensor further includes a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.
摘要翻译： 提出了一种微机电系统电流和磁场传感器。 微机电系统电流和磁场传感器被配置为感测由载流导体产生的磁场。 该传感器包括结构部件，其包括基板和柔性层，耦合到结构部件的磁 - 机械转换器，以提供磁场的机械指示。 传感器还包括耦合到结构部件的应变响应部件以感测机械指示并且响应于此而提供载流导体中的电流的指示。
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8.发明申请MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT AND MAGNETIC FIELD SENSOR USING TUNNELING CURRENT SENSING 有权基于微机电系统（MEMS）的电流和使用隧道式电流传感器的磁场传感器公开(公告)号：US20070181963A1
公开(公告)日：2007-08-09
申请号：US11736678
申请日：2007-04-18
IPC分类号： H01L29/84
CPC分类号： G01R15/207 , G01R15/148 , G01R33/0283 , G01R33/0286 , G01R35/005
摘要： A micro-electro-mechanical system (MEMS) current sensor for sensing a magnetic field produced by an electrical current flowing in a conductor includes a first fixed element and a moving element. The moving element is spaced away from the first fixed element and is movable relative to the fixed element responsive to a magnetic field produced by an electrical current flowing in a conductor for providing a mechanical indication of a strength of the magnetic field. The sensor also includes a tunneling current generator for generating a tunneling current between the first fixed element and the moving element and a tunneling current monitor for monitoring a change in the tunneling current responsive to the mechanical indication to provide an indication of a value of the electrical current in the conductor.
摘要翻译： 用于感测由在导体中流动的电流产生的磁场的微机电系统（MEMS）电流传感器包括第一固定元件和移动元件。 移动元件与第一固定元件间隔开，并且可响应于在导体中流动的电流产生的磁场相对于固定元件移动，以提供磁场强度的机械指示。 传感器还包括用于在第一固定元件和移动元件之间产生隧道电流的隧道电流发生器，以及隧道电流监视器，用于响应于机械指示监视隧道电流的变化，以提供电气值的指示 电流在导体中。
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公开(公告)号：US08364427B2
公开(公告)日：2013-01-29
申请号：US12683474
申请日：2010-01-07
IPC分类号： G01F1/00
摘要： A flow sensor assembly is provided and includes a flow conduit configured to impart a disturbance to a flow, multiple sensors disposed at respective sensing locations along the flow conduit. Each sensor is responsive to the disturbance of the flow and generates a corresponding response signal. The flow sensor assembly further includes a processor operably connected to each sensor, the processor being configured to compute a cross-correlation function between the response signals generated by said sensors, and determine a flow rate and a direction for the flow through the conduit based on the computed cross-correlation function. Additional flow sensor assembly arrangements are also disclosed.
摘要翻译： 提供了一种流量传感器组件，并且包括配置成对流动造成干扰的流动管道，设置在沿着流动管道的各个感测位置处的多个传感器。 每个传感器响应于流动的干扰并产生相应的响应信号。 所述流量传感器组件还包括可操作地连接到每个传感器的处理器，所述处理器被配置为计算由所述传感器产生的所述响应信号之间的互相关函数，并且基于所述传感器确定流速和通过所述导管的流动的方向 计算的互相关函数。 还公开了附加的流量传感器组件装置。
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10.发明授权Micro-electromechanical system (MEMS) based current and magnetic field sensor using tunneling current sensing 有权基于微机电系统（MEMS）的电流和磁场传感器使用隧道电流检测公开(公告)号：US07741832B2
公开(公告)日：2010-06-22
申请号：US11736678
申请日：2007-04-18
申请人： Ertugrul Berkcan , Christopher James Kapusta , Marco Francesco Aimi , Shankar Chandrasekaran , Glenn Scott Claydon
发明人： Ertugrul Berkcan , Christopher James Kapusta , Marco Francesco Aimi , Shankar Chandrasekaran , Glenn Scott Claydon
IPC分类号： G01R33/00
CPC分类号： G01R15/207 , G01R15/148 , G01R33/0283 , G01R33/0286 , G01R35/005
摘要： A micro-electro-mechanical system (MEMS) current sensor for sensing a magnetic field produced by an electrical current flowing in a conductor includes a first fixed element and a moving element. The moving element is spaced away from the first fixed element and is movable relative to the fixed element responsive to a magnetic field produced by an electrical current flowing in a conductor for providing a mechanical indication of a strength of the magnetic field. The sensor also includes a tunneling current generator for generating a tunneling current between the first fixed element and the moving element and a tunneling current monitor for monitoring a change in the tunneling current responsive to the mechanical indication to provide an indication of a value of the electrical current in the conductor.
摘要翻译： 用于感测由在导体中流动的电流产生的磁场的微机电系统（MEMS）电流传感器包括第一固定元件和移动元件。 移动元件与第一固定元件间隔开，并且可响应于在导体中流动的电流产生的磁场相对于固定元件移动，以提供磁场强度的机械指示。 传感器还包括用于在第一固定元件和移动元件之间产生隧道电流的隧道电流发生器，以及隧道电流监视器，用于响应于机械指示监视隧道电流的变化，以提供电气值的指示 电流在导体中。
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