发明申请
US20070201967A1 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
审中-公开
减少能力承运人，运输，装卸港，缓冲系统
- 专利标题： REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEM
- 专利标题（中）： 减少能力承运人，运输，装卸港，缓冲系统
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申请号： US11556584申请日： 2006-11-03
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公开(公告)号： US20070201967A1公开(公告)日： 2007-08-30
- 发明人: Michael Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert May
- 申请人： Michael Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert May
- 主分类号： B65H1/00
- IPC分类号： B65H1/00
摘要：
A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
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