发明申请
- 专利标题: Nonvolatile memory devices and methods of forming the same
- 专利标题(中): 非易失存储器件及其形成方法
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申请号: US11653359申请日: 2007-01-16
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公开(公告)号: US20070205459A1公开(公告)日: 2007-09-06
- 发明人: Eun-Suk Cho , Dong-Gun Park , Choong-Ho Lee , Jong-Jin Lee , Jeong-Dong Choe
- 申请人: Eun-Suk Cho , Dong-Gun Park , Choong-Ho Lee , Jong-Jin Lee , Jeong-Dong Choe
- 优先权: KR2006-0020021 20060302
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A nonvolatile memory device includes a semiconductor pin including a first semiconductor pattern, a second semiconductor pattern on the first semiconductor pattern, and a third semiconductor pattern, disposed between the first semiconductor pattern and the second semiconductor pattern, connecting the first semiconductor pattern and the second semiconductor pattern, a charge storage layer on the second semiconductor pattern with a tunneling insulation layer interposed therebetween, and a gate electrode on the charge storage layer with a blocking insulation layer interposed therebetween, wherein a width of the second semiconductor pattern is greater than a width of the third semiconductor pattern.
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