发明申请
US20070206194A1 SENSOR ELEMENT STRUCTURE, SENSOR ELEMENT ARRAY, AND MANUFACTURING METHOD OF SENSOR ELEMENT ARRAY
有权
传感器元件结构,传感器元件阵列和传感器元件阵列的制造方法
- 专利标题: SENSOR ELEMENT STRUCTURE, SENSOR ELEMENT ARRAY, AND MANUFACTURING METHOD OF SENSOR ELEMENT ARRAY
- 专利标题(中): 传感器元件结构,传感器元件阵列和传感器元件阵列的制造方法
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申请号: US11677890申请日: 2007-02-22
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公开(公告)号: US20070206194A1公开(公告)日: 2007-09-06
- 发明人: Tomohiro Yamada , Yoichiro Handa
- 申请人: Tomohiro Yamada , Yoichiro Handa
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2006-057908 20060303
- 主分类号: G01N21/55
- IPC分类号: G01N21/55 ; B32B27/04
摘要:
Even when only a few antigens exist in a specimen, a change in a dielectric constant and a change in an optical spectrum accompanied thereto in the periphery of a conductive member are made larger, so that sensing at high sensitivity can be performed. A structure including a protrusion including a dielectric material protruded on a substrate and a conductive member provided on a first surface of the protrusion, in which the maximum value of the cross-sectional area in the cross-section in parallel with a first surface of the conductive member is larger than the area of the first surface.
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