发明申请
US20070206456A1 TRAJECTORY MAPPING FOR IMPROVED MOTION-SYSTEM JITTER WHILE MINIMIZING TRACKING ERROR
审中-公开
用于改善运动系统抖动的轨迹绘图在最小化跟踪误差
- 专利标题： TRAJECTORY MAPPING FOR IMPROVED MOTION-SYSTEM JITTER WHILE MINIMIZING TRACKING ERROR
- 专利标题（中）： 用于改善运动系统抖动的轨迹绘图在最小化跟踪误差
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申请号： US11537054申请日： 2006-09-29
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公开(公告)号： US20070206456A1公开(公告)日： 2007-09-06
- 发明人: Jeffrey Sullivan , Benyamin Buller , Eugene Mirro , William Eckes
- 申请人： Jeffrey Sullivan , Benyamin Buller , Eugene Mirro , William Eckes
- 主分类号： G11B7/00
- IPC分类号： G11B7/00
摘要：
Methods and apparatus to compensate for low-frequency tracking errors in motion control of a movable stage are provided. By recording tracking errors during earlier traversal of a trajectory, filtering, and applying those recorded tracking errors to subsequent traversals of the same or a similar trajectory, tracking errors of the subsequent traversals may be significantly reduced.
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