Invention Application
- Patent Title: THIN FILM TRANSISTOR STRUCTURE AND METHOD OF FABRICATING THE SAME
- Patent Title (中): 薄膜晶体管结构及其制造方法
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Application No.: US11561898Application Date: 2006-11-21
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Publication No.: US20070210310A1Publication Date: 2007-09-13
- Inventor: Chi-Lin Chen , Yu-Cheng Chen , Hsing-Hua Wu , Po-Tsun Liu
- Applicant: Chi-Lin Chen , Yu-Cheng Chen , Hsing-Hua Wu , Po-Tsun Liu
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Priority: TW95107552 20060307
- Main IPC: H01L29/04
- IPC: H01L29/04

Abstract:
A structure of a thin film transistor and a method for making the same are provided. The structure includes a strip-shaped silicon island, a gate, and a first and second ion doping regions. The strip-shaped silicon island is a thin film region with a predetermined long side and short side, and farther has a plurality of lateral grain boundaries substantially parallel to the short side of the silicon island. The gate is located over the silicon island and substantially parallel to the lateral grain boundaries. The first and second ion doping regions, used as source/drain regions of the TFT, are located at two sides along the long side of the island and substantially perpendicular to the gate.
Public/Granted literature
- US07795683B2 Thin film transistor structure Public/Granted day:2010-09-14
Information query
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