发明申请
US20070212200A1 LIFTER AND TARGET OBJECT PROCESSING APPARATUS PROVIDED WITH LIFTER
审中-公开
LIFTER和目标物件加工设备
- 专利标题： LIFTER AND TARGET OBJECT PROCESSING APPARATUS PROVIDED WITH LIFTER
- 专利标题（中）： LIFTER和目标物件加工设备
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申请号： US11683015申请日： 2007-03-07
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公开(公告)号： US20070212200A1公开(公告)日： 2007-09-13
- 发明人: Atsushi Ueda , Jun Yamashita
- 申请人： Atsushi Ueda , Jun Yamashita
- 申请人地址： JP Tokyo
- 专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人地址： JP Tokyo
- 优先权： JP2006-064410 20060309; JP2006-071670 20060315
- 主分类号： H01L21/677
- IPC分类号： H01L21/677
摘要：
Each pin fixing portion is fitted in a through-hole formed in a lifter arm, and includes a flange portion, a movable portion, a screw portion, and a pin insertion hole. A pin is fixedly screwed into the pin insertion hole at a lower end. The movable portion is inserted with an allowance in the through-hole, and the flange portion is set in contact with an upper surface of the lifter arm. The screw portion projects downward from the through-hole. A lower support portion is screwed on the screw portion and set in contact with a lower surface of the lifter arm.
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