发明申请
- 专利标题: SURFACE INSPECTION APPARATUS AND SURFACE INSPECTION METHOD
- 专利标题(中): 表面检查装置和表面检查方法
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申请号: US11754417申请日: 2007-05-29
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公开(公告)号: US20070222977A1公开(公告)日: 2007-09-27
- 发明人: Yoshinori Hayashi , Hiroyuki Naraidate , Makoto Kyoya , Koji Izunome , Hiromi Nagahama , Miyuki Shimizu , Kazuhiko Hamatani
- 申请人: Yoshinori Hayashi , Hiroyuki Naraidate , Makoto Kyoya , Koji Izunome , Hiromi Nagahama , Miyuki Shimizu , Kazuhiko Hamatani
- 申请人地址: JP Kanagawa 247-8610 JP Tokyo
- 专利权人: SHIBAURA MECHATRONICS CORPORATION,TOSHIBA CERAMICS CO., LTD.
- 当前专利权人: SHIBAURA MECHATRONICS CORPORATION,TOSHIBA CERAMICS CO., LTD.
- 当前专利权人地址: JP Kanagawa 247-8610 JP Tokyo
- 优先权: JP2004-345141 20041130
- 主分类号: G01N21/88
- IPC分类号: G01N21/88
摘要:
A surface inspection apparatus, for inspecting a plurality of surfaces formed in a peripheral edge portion of a plate-like object, includes a image pickup mechanism, which photographs the peripheral edge portion of the plate-like object having a plurality of surfaces, and an image processing device, which processes an image obtained by the photographing device. The image pickup mechanism includes an optical system which guides images of the plurality of surfaces of the plate-like object in one direction, and a camera unit having an image pickup surface, on which the images of the plurality of surfaces guided by the optical system in the one direction are formed.
公开/授权文献
- US07403278B2 Surface inspection apparatus and surface inspection method 公开/授权日:2008-07-22
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