公开(公告)号：US20090066933A1

公开(公告)日：2009-03-12

申请号：US11908554

申请日：2006-03-27

申请人： Hideaki Takano ,  Miyuki Shimizu ,  Takeshi Sendia ,  Koji Izunome ,  Yoshinori Hayashi ,  Kazuhiko Hamatani

发明人： Hideaki Takano ,  Miyuki Shimizu ,  Takeshi Sendia ,  Koji Izunome ,  Yoshinori Hayashi ,  Kazuhiko Hamatani

IPC分类号： G01B11/16

CPC分类号： H01L22/12 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8822 ,  H01L21/67288 ,  H01L2924/0002 ,  H01L2924/00

摘要： An image pickup device disposed in a predetermined position relative to a surface of a strained silicon wafer photographs the surface of the strained silicon wafer in a plurality of rotation angle positions on photographing conditions under which bright lines appearing on the surface of the strained silicon wafer can be photographed, in an environment where a light source device illuminates the surface of the strained silicon wafer which is rotating. A composite image in a predetermined angle position is generated from surface images of the strained silicon wafer in a plurality of rotation angle positions obtained by the image pickup device.

摘要翻译： 设置在相对于应变硅晶片的表面的预定位置的图像拾取装置在拍摄条件下以多个旋转角度位置拍摄应变硅晶片的表面，在该条件下，出现在应变硅晶片的表面上的亮线可以 在光源装置照射正在旋转的应变硅晶片的表面的环境中进行照相。 在由图像拾取装置获得的多个旋转角位置中，从应变硅晶片的表面图像生成预定角度位置的合成图像。

公开(公告)号：US07403278B2

公开(公告)日：2008-07-22

申请号：US11754417

申请日：2007-05-29

申请人： Yoshinori Hayashi ,  Hiroyuki Naraidate ,  Makoto Kyoya ,  Koji Izunome ,  Hiromi Nagahama ,  Miyuki Shimizu ,  Kazuhiko Hamatani

发明人： Yoshinori Hayashi ,  Hiroyuki Naraidate ,  Makoto Kyoya ,  Koji Izunome ,  Hiromi Nagahama ,  Miyuki Shimizu ,  Kazuhiko Hamatani

IPC分类号： G01B21/00

CPC分类号： G01N21/9506 ,  G01N21/9501 ,  G01N21/9503 ,  G01N2021/8841

摘要： A surface inspection apparatus, for inspecting a plurality of surfaces formed in a peripheral edge portion of a plate-like object, includes a image pickup mechanism, which photographs the peripheral edge portion of the plate-like object having a plurality of surfaces, and an image processing device, which processes an image obtained by the photographing device. The image pickup mechanism includes an optical system which guides images of the plurality of surfaces of the plate-like object in one direction, and a camera unit having an image pickup surface, on which the images of the plurality of surfaces guided by the optical system in the one direction are formed.

摘要翻译： 一种表面检查装置，用于检查形成在板状物体的周边部分中的多个表面，包括摄像机构，其对具有多个表面的板状物体的周边部分进行拍摄;以及 图像处理装置，其处理由拍摄装置获得的图像。 图像拾取机构包括：在一个方向上引导板状物体的多个表面的图像的光学系统和具有图像拾取表面的照相机单元，多个表面的图像由光学系统 在一个方向上形成。

公开(公告)号：US4794531A

公开(公告)日：1988-12-27

申请号：US41627

申请日：1987-04-22

申请人： Koichi Morishita ,  Shimbu Yamagata ,  Tetsuo Okabe ,  Tetsuo Yokoyama ,  Kazuhiko Hamatani

发明人： Koichi Morishita ,  Shimbu Yamagata ,  Tetsuo Okabe ,  Tetsuo Yokoyama ,  Kazuhiko Hamatani

IPC分类号： G06T5/20 ,  G06F15/68

CPC分类号： G06T5/004 ,  G06T5/20

摘要： In an unsharp masking processing for sharpening images such as radiographic images, an emphasizing coefficient of an image and parameters for real-time change of picture quality are set interactively. The entire image is divided into a plurality of regional images and filtering optimized for each pixel image is effected using a standard deviation computed for each regional image and a density difference between pixel images.

摘要翻译： 在用于锐化诸如放射线照相图像的图像的不清晰的掩蔽处理中，交互地设置图像的强调系数和用于画面质量的实时改变的参数。 整个图像被分成多个区域图像，并且使用针对每个区域图像计算的标准偏差和像素图像之间的密度差来实现针对每个像素图像优化的滤波。

公开(公告)号：US07679730B2

公开(公告)日：2010-03-16

申请号：US11908554

申请日：2007-09-13

申请人： Hideaki Takano ,  Miyuki Shimizu ,  Takeshi Senda ,  Koji Izunome ,  Yoshinori Hayashi ,  Kazuhiko Hamatani

发明人： Hideaki Takano ,  Miyuki Shimizu ,  Takeshi Senda ,  Koji Izunome ,  Yoshinori Hayashi ,  Kazuhiko Hamatani

IPC分类号： G01B11/16

CPC分类号： H01L22/12 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8822 ,  H01L21/67288 ,  H01L2924/0002 ,  H01L2924/00

摘要： An image pickup device disposed in a predetermined position relative to a surface of a strained silicon wafer photographs the surface of the strained silicon wafer in a plurality of rotation angle positions on photographing conditions under which bright lines appearing on the surface of the strained silicon wafer can be photographed, in an environment where a light source device illuminates the surface of the strained silicon wafer which is rotating. A composite image in a predetermined angle position is generated from surface images of the strained silicon wafer in a plurality of rotation angle positions obtained by the image pickup device.

摘要翻译： 设置在相对于应变硅晶片的表面的预定位置的图像拾取装置在拍摄条件下以多个旋转角度位置拍摄应变硅晶片的表面，在该条件下，出现在应变硅晶片的表面上的亮线可以 在光源装置照射正在旋转的应变硅晶片的表面的环境中进行照相。 在由图像拾取装置获得的多个旋转角位置中，从应变硅晶片的表面图像生成预定角度位置的合成图像。

公开(公告)号：US20070222977A1

公开(公告)日：2007-09-27

申请号：US11754417

申请日：2007-05-29

申请人： Yoshinori Hayashi ,  Hiroyuki Naraidate ,  Makoto Kyoya ,  Koji Izunome ,  Hiromi Nagahama ,  Miyuki Shimizu ,  Kazuhiko Hamatani

发明人： Yoshinori Hayashi ,  Hiroyuki Naraidate ,  Makoto Kyoya ,  Koji Izunome ,  Hiromi Nagahama ,  Miyuki Shimizu ,  Kazuhiko Hamatani

IPC分类号： G01N21/88

CPC分类号： G01N21/9506 ,  G01N21/9501 ,  G01N21/9503 ,  G01N2021/8841

摘要： A surface inspection apparatus, for inspecting a plurality of surfaces formed in a peripheral edge portion of a plate-like object, includes a image pickup mechanism, which photographs the peripheral edge portion of the plate-like object having a plurality of surfaces, and an image processing device, which processes an image obtained by the photographing device. The image pickup mechanism includes an optical system which guides images of the plurality of surfaces of the plate-like object in one direction, and a camera unit having an image pickup surface, on which the images of the plurality of surfaces guided by the optical system in the one direction are formed.

摘要翻译： 一种表面检查装置，用于检查形成在板状物体的周边部分中的多个表面，包括摄像机构，其对具有多个表面的板状物体的周边部分进行拍摄;以及 图像处理装置，其处理由拍摄装置获得的图像。 图像拾取机构包括：在一个方向上引导板状物体的多个表面的图像的光学系统和具有图像拾取表面的照相机单元，多个表面的图像由光学系统 在一个方向上形成。