发明申请
US20070229942A1 METHOD OF PRODUCING MOLD HAVING UNEVEN STRUCTURE, MOLD FOR OPTICAL ELEMENT, AND OPTICAL ELEMENT 有权
生产具有未来结构的模具的方法,光学元件和光学元件的模具

METHOD OF PRODUCING MOLD HAVING UNEVEN STRUCTURE, MOLD FOR OPTICAL ELEMENT, AND OPTICAL ELEMENT
摘要:
A method of producing a mold having an uneven structure and a mold for an optical element are provided. The method includes forming on a nickel substrate a mixed film using nickel and a material which phase separates from nickel simultaneously, the mixed film including a plurality of cylinders including nickel as a component thereof and a matrix region including the material which phase separates from nickel as a component thereof and surrounding the plurality of cylinders; and removing the matrix portion from the mixed film by etching to give a mold including nickel or a nickel alloy. The uneven structure is disposed in plurality on the substrate, and a pitch of the uneven structure is within a range of 30 nm or more and 500 nm or less and a depth of the uneven structure is within a range of 100 nm or more.
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