Invention Application
US20070237005A1 Split gate NAND flash memory structure and array, method of programming, erasing and reading thereof, and method of manufacturing
有权
分闸门NAND闪存结构和阵列,编程方法,擦除和读取方法以及制造方法
- Patent Title: Split gate NAND flash memory structure and array, method of programming, erasing and reading thereof, and method of manufacturing
- Patent Title (中): 分闸门NAND闪存结构和阵列,编程方法,擦除和读取方法以及制造方法
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Application No.: US11810714Application Date: 2007-06-06
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Publication No.: US20070237005A1Publication Date: 2007-10-11
- Inventor: Yuniarto Widjaja , John Cooksey , Changyuan Chen , Feng Gao , Ya-Fen Lin , Dana Lee
- Applicant: Yuniarto Widjaja , John Cooksey , Changyuan Chen , Feng Gao , Ya-Fen Lin , Dana Lee
- Main IPC: G11C11/34
- IPC: G11C11/34

Abstract:
A split gate NAND flash memory structure is formed on a semiconductor substrate of a first conductivity type. The NAND structure comprises a first region of a second conductivity type in the substrate with a second region of the second conductivity type in the substrate, spaced apart from the first region. A continuous first channel region is defined between the first region and the second region. A plurality of floating gates are spaced apart from one another with each positioned over a separate portion of the channel region. A plurality of control gates are provided with each associated with and adjacent to a floating gate. Each control gate has two portions: a first portion over a portion of the channel region and a second portion over the associated floating gate and capacitively coupled thereto.
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