Invention Application
- Patent Title: Substrate treatment apparatus
- Patent Title (中): 基板处理装置
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Application No.: US11783689Application Date: 2007-04-11
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Publication No.: US20070240646A1Publication Date: 2007-10-18
- Inventor: Jong-Jin Jun
- Applicant: Jong-Jin Jun
- Assignee: Advanced Display Process Engineering Co., Ltd.
- Current Assignee: Advanced Display Process Engineering Co., Ltd.
- Priority: KR10-2006-0033518 20060413
- Main IPC: C23F1/00
- IPC: C23F1/00 ; C23C16/00

Abstract:
The present invention relates to a substrate treatment apparatus, and more particularly, to a substrate treatment apparatus, wherein lift pins can be installed while the levels of the lift pins are easily adjusted using a tool such as a wrench. A substrate treatment apparatus of the present invention comprises a chamber; a pin plate provided inside or outside the chamber; a driving means for lifting or lowering the pin plate; and at least one lift pin that penetrates through the pin plate so that the lift pin is coupled to the pin plate, and has a tool insertion recess formed at a lower end of the lift pin.
Information query