发明申请
- 专利标题: Liquid processing apparatus
- 专利标题(中): 液体处理设备
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申请号: US11785351申请日: 2007-04-17
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公开(公告)号: US20070240824A1公开(公告)日: 2007-10-18
- 发明人: Satoshi Kaneko , Kazuhisa Matsumoto , Norihiro Ito , Masami Akimoto , Takayuki Toshima , Hiromitsu Nanba
- 申请人: Satoshi Kaneko , Kazuhisa Matsumoto , Norihiro Ito , Masami Akimoto , Takayuki Toshima , Hiromitsu Nanba
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 优先权: JPJP2006-114960 20060418
- 主分类号: B05C13/02
- IPC分类号: B05C13/02 ; B08B3/00 ; H01L21/306
摘要:
A liquid processing apparatus includes a substrate holding member configured to rotate along with a substrate held thereon in a horizontal state; a rotary cup configured to surround the substrate and to rotate along with the substrate; a liquid supply mechanism configured to supply a process liquid onto at least a front surface of the substrate; and an exhaust/drain section configured to perform gas-exhausting and liquid-draining out of the rotary cup; and a guide member disposed to surround the substrate, having an upper surface to be substantially continued to the front surface of the substrate, and configured to rotate along with the substrate holding member and the rotary cup, such that a process liquid supplied onto the front surface of the substrate and thrown off from the substrate is guided by the upper surface of the guide member from the rotary cup to the exhaust/drain section.
公开/授权文献
- US07998308B2 Liquid processing apparatus 公开/授权日:2011-08-16
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