- 专利标题: Solid state image pickup device and manufacturing method thereof and semiconductor integrated circuit device and manufacturing method thereof
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申请号: US11808450申请日: 2007-06-11
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公开(公告)号: US20070241416A1公开(公告)日: 2007-10-18
- 发明人: Masafumi Muramatsu
- 申请人: Masafumi Muramatsu
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JPP2004-095873 20040329
- 主分类号: H01L27/142
- IPC分类号: H01L27/142 ; H01L27/00
摘要:
A method of manufacturing a solid-state image pickup device comprises a process for forming a plurality of photoelectric conversion elements PD within a semiconductor substrate 4, a process for forming an interconnection portion, having an interconnection layer 8 in an insulating layer 7, on the surface side of the semiconductor substrate 4, a process for forming an adhesive layer, made of a material cured at a temperature lower than a deterioration starting temperature of the interconnection layer 8, on the surface of the interconnection portion and bonding a supporting substrate 30 to the surface side of the interconnection portion through the adhesive layer 9 by heat treatment at a temperature lower than the deterioration starting temperature of the interconnection layer 8 and a process for decreasing a thickness of the semiconductor substrate 4 from the back side. A solid-state image pickup device manufacturing method can bond the supporting substrate 30 to the surface side of the interconnection portion through the adhesive layer 9 without exerting a thermal influence upon the interconnection layer 8 that was previously formed on the surface side of the semiconductor substrate 4.
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