• 专利标题: Solid state image pickup device and manufacturing method thereof and semiconductor integrated circuit device and manufacturing method thereof
  • 申请号: US11808450
    申请日: 2007-06-11
  • 公开(公告)号: US20070241416A1
    公开(公告)日: 2007-10-18
  • 发明人: Masafumi Muramatsu
  • 申请人: Masafumi Muramatsu
  • 申请人地址: JP Tokyo
  • 专利权人: Sony Corporation
  • 当前专利权人: Sony Corporation
  • 当前专利权人地址: JP Tokyo
  • 优先权: JPP2004-095873 20040329
  • 主分类号: H01L27/142
  • IPC分类号: H01L27/142 H01L27/00
Solid state image pickup device and manufacturing method thereof and semiconductor integrated circuit device and manufacturing method thereof
摘要:
A method of manufacturing a solid-state image pickup device comprises a process for forming a plurality of photoelectric conversion elements PD within a semiconductor substrate 4, a process for forming an interconnection portion, having an interconnection layer 8 in an insulating layer 7, on the surface side of the semiconductor substrate 4, a process for forming an adhesive layer, made of a material cured at a temperature lower than a deterioration starting temperature of the interconnection layer 8, on the surface of the interconnection portion and bonding a supporting substrate 30 to the surface side of the interconnection portion through the adhesive layer 9 by heat treatment at a temperature lower than the deterioration starting temperature of the interconnection layer 8 and a process for decreasing a thickness of the semiconductor substrate 4 from the back side. A solid-state image pickup device manufacturing method can bond the supporting substrate 30 to the surface side of the interconnection portion through the adhesive layer 9 without exerting a thermal influence upon the interconnection layer 8 that was previously formed on the surface side of the semiconductor substrate 4.
信息查询
IPC分类:
H 电学
H01 基本电气元件
H01L 半导体器件;其他类目中不包括的电固体器件(使用半导体器件的测量入G01;一般电阻器入H01C;磁体、电感器、变压器入H01F;一般电容器入H01G;电解型器件入H01G9/00;电池组、蓄电池入H01M;波导管、谐振器或波导型线路入H01P;线路连接器、汇流器入H01R;受激发射器件入H01S;机电谐振器入H03H;扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R;一般电光源入H05B;印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K;在具有特殊应用的电路中使用的半导体器件见应用相关的小类)
H01L27/00 由在一个共用衬底内或其上形成的多个半导体或其他固态组件组成的器件(其零部件入H01L23/00,H01L29/00至H01L51/00;由多个单个固态器件组成的组装件入H01L25/00)
H01L27/14 .包括有对红外辐射、光、较短波长的电磁辐射或者微粒子辐射并且专门适用于把这样的辐射能转换为电能的,或适用于通过这样的辐射控制电能的半导体组件的(只与一个或多个电光源在结构上相结合的辐射敏感元件入H01L31/14;光导与光电元件的耦合入G02B6/42)
H01L27/142 ..能量转换器件(包括与光伏电池集成或者直接相关的旁路二极管的单个光伏电池的光伏模块或者阵列只入H01L31/0443;由沉积在同一衬底上的多个薄膜太阳能电池组成的光伏模块入H01L31/046)
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