发明申请
US20070247623A1 Polarization measuring devices, ellipsometers and polarization measuring methods
审中-公开
极化测量装置,椭偏仪和偏振测量方法
- 专利标题: Polarization measuring devices, ellipsometers and polarization measuring methods
- 专利标题(中): 极化测量装置,椭偏仪和偏振测量方法
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申请号: US11723992申请日: 2007-03-23
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公开(公告)号: US20070247623A1公开(公告)日: 2007-10-25
- 发明人: Dong-wan Kim , Dong-gun Lee , Kyoung-yoon Bang
- 申请人: Dong-wan Kim , Dong-gun Lee , Kyoung-yoon Bang
- 优先权: KR10-2006-0026699 20060323
- 主分类号: G01J4/00
- IPC分类号: G01J4/00
摘要:
A polarization measuring device includes a diffraction grating and a detector. The diffraction grating is configured to diffract incident light to observe the polarization state of the light. The detector is configured to receive the light diffracted by the diffraction grating and display the polarization state of the light.
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