METHOD OF MANUFACTURING REFLECTIVE EXTREME ULTRAVIOLET MASK
    2.
    发明申请
    METHOD OF MANUFACTURING REFLECTIVE EXTREME ULTRAVIOLET MASK 审中-公开
    制造反射极限超紫外线掩膜的方法

    公开(公告)号:US20150168822A1

    公开(公告)日:2015-06-18

    申请号:US14630825

    申请日:2015-02-25

    IPC分类号: G03F1/24 G03F1/80

    CPC分类号: G03F1/24 G03F1/38 G03F1/80

    摘要: A reflective extreme ultraviolet mask includes a mask substrate having an exposing region and a peripheral region, the mask substrate including a light-scattering portion in the peripheral region, a reflective layer on an upper surface of the mask substrate, the reflective layer having a first opening exposing the light-scattering portion, and an absorbing layer pattern on the reflective layer, the absorbing layer pattern having a second opening in light communication with the first opening.

    摘要翻译: 反射性极紫外线掩模包括具有曝光区域和周边区域的掩模基板,所述掩模基板在所述周边区域中包括光散射部分,所述掩模基板的上表面上的反射层,所述反射层具有第一 打开曝光光散射部分和在反射层上的吸收层图案,吸收层图案具有与第一开口光连通的第二开口。

    NON-CONTACT MECHANICAL ENERGY HARVESTING DEVICE AND METHOD UTILIZING FREQUENCY RECTIFICATION
    4.
    发明申请
    NON-CONTACT MECHANICAL ENERGY HARVESTING DEVICE AND METHOD UTILIZING FREQUENCY RECTIFICATION 审中-公开
    非接触式机械能量采集装置及利用频率整流的方法

    公开(公告)号:US20120267982A1

    公开(公告)日:2012-10-25

    申请号:US12518613

    申请日:2007-12-21

    IPC分类号: H01L41/113

    CPC分类号: H02N2/186 H01L41/1136

    摘要: An energy harvesting apparatus includes an inverse frequency rectifier structured to receive mechanical energy at a first frequency, and a solid state electromechanical transducer coupled to the inverse frequency rectifier to receive a force provided by the inverse frequency rectifier. The force, when provided by the inverse frequency rectifier, causes the solid state transducer to be subjected to a second frequency that is higher than the first frequency to thereby generate electrical power. The coupling of the solid state electromechanical transducer to the inverse frequency rectifier is a non-contact coupling.

    摘要翻译: 能量收集装置包括被构造成以第一频率接收机械能的反频整流器,以及耦合到逆频整流器以接收由逆频整流器提供的力的固态机电换能器。 当由逆频整流器提供时,该力使固态传感器经受高于第一频率的第二频率,从而产生电力。 固态机电换能器与逆频整流器的耦合是非接触耦合。

    Reflection Mask For EUV Lithography, System For EUV Lithography, And Method Of Fixing The Reflection Mask For EUV Lithography
    5.
    发明申请
    Reflection Mask For EUV Lithography, System For EUV Lithography, And Method Of Fixing The Reflection Mask For EUV Lithography 审中-公开
    EUV光刻反射掩模,EUV平版印刷系统和固定EUV光刻反射掩模的方法

    公开(公告)号:US20120127444A1

    公开(公告)日:2012-05-24

    申请号:US13221286

    申请日:2011-08-30

    IPC分类号: G03B27/70 G03F1/00

    摘要: Example embodiments of the inventive concepts relate to a reflection mask including an upper surface configured to reflect extreme ultraviolet EUV light, a lower surface opposite the upper surface, where the lower surface includes at least one alignment key. The reflection mask may include a conductive layer, a substrate on the conductive layer, a reflection layer on the substrate, and an absorption pattern on the reflection layer. The reflection layer may define the upper surface configured to reflect extreme ultraviolet EUV light. The absorption pattern may expose the upper surface of the reflection layer.

    摘要翻译: 本发明构思的示例实施例涉及一种反射掩模,其包括被配置为反射极紫外EUV光的上表面,与上表面相对的下表面,其中下表面包括至少一个对准键。 反射掩模可以包括导电层,导电层上的衬底,衬底上的反射层和反射层上的吸收图案。 反射层可以限定被配置为反射极紫外EUV光的上表面。 吸收图案可以暴露反射层的上表面。

    Method of measuring phase of phase shift mask
    6.
    发明授权
    Method of measuring phase of phase shift mask 有权
    测量相移掩模相位的方法

    公开(公告)号:US08138483B2

    公开(公告)日:2012-03-20

    申请号:US12489600

    申请日:2009-06-23

    IPC分类号: G01J1/42

    摘要: In a method of measuring a phase of a phase shift mask, initial extreme ultraviolet (EUV) light is divided into secondary EUV light portions. The secondary EUV light portions are irradiated onto the phase shift mask as incident EUV light portions, and the phase of the phase shift mask is measured from reflected incident EUV light portions.

    摘要翻译: 在测量相移掩模的相位的方法中,初始极紫外(EUV)光被分成次级EUV光部分。 次级EUV光部分作为入射EUV光部分照射到相移掩模上,并且从反射入射的EUV光部分测量相移掩模的相位。

    SURFACE EXPRESSION METHOD OF PEPTIDES P5 AND ANAL3 USING THE GENE ENCODING POLY-GAMMA-GLUTAMATE SYNTHETASE
    10.
    发明申请
    SURFACE EXPRESSION METHOD OF PEPTIDES P5 AND ANAL3 USING THE GENE ENCODING POLY-GAMMA-GLUTAMATE SYNTHETASE 有权
    使用基因编码多糖 - 谷氨酸合成酶的肽P5和ANAL3的表面表达方法

    公开(公告)号:US20070253935A1

    公开(公告)日:2007-11-01

    申请号:US11622158

    申请日:2007-01-11

    IPC分类号: A61K39/00 C12N1/21 C12N15/00

    CPC分类号: C07K14/32

    摘要: The present invention relates to a method for expressing each of peptide antibiotics P5 3 and Anal3 35 having amphiphilicity and showing antibacterial, antifungal and anticancer activities 61, 63, 65, 67, 69, 71, on the microbial surface, using a vector containing outer membrane protein genes (pgsBCA) that are derived from Bacillus sp. strains and involved in the synthesis of poly-gamma-glutamate. Moreover, the present invention relates to lactic acid-forming bacteria having each of the peptide antibiotics P5 15 and Anal3 43 expressed on their surface, and the use thereof. According to the present invention, the peptide antibiotics can be expressed on the surface of various microorganisms transformed with the surface expression vectors. The inventive method for the surface expression of the peptide antibiotics allows the peptide antibiotics to be mass-produced without a purification process. Thus, the inventive method has very high industrial applicability. Further, the present invention can be applied to other peptide antibiotics besides P5 3 and Anal3 35.

    摘要翻译: 本发明涉及使用载体表达在微生物表面上表现出具有两亲性的肽抗生素P 5 3和Anal 3 35的各种抗细菌,抗真菌和抗癌活性61,63,65,67,69,71的方法, 含有源自芽孢杆菌属的外膜蛋白基因(pgsBCA)。 菌株并参与了聚-γ-谷氨酸的合成。 此外,本发明涉及具有表面表达的肽抗生素P515和Anal343各自的乳酸形成细菌及其用途。 根据本发明,肽抗生素可以在用表面表达载体转化的各种微生物的表面上表达。 肽抗生素表面表达的本发明方法允许肽抗生素在没有纯化过程的情况下批量生产。 因此,本发明的方法具有非常高的工业实用性。 此外,除了P 5 3和Anal 3 35之外,本发明可以应用于其他肽抗生素。