发明申请
- 专利标题： Refractive projection objective
- 专利标题（中）： 折射投影物镜
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申请号： US11716679申请日： 2007-03-12
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公开(公告)号： US20070247722A1公开(公告)日： 2007-10-25
- 发明人: Hans-Juergen Rostalski , Karl-Heinz Schuster , Russell Hudyma , Wilhelm Ulrich , Rolf Freimann
- 申请人： Hans-Juergen Rostalski , Karl-Heinz Schuster , Russell Hudyma , Wilhelm Ulrich , Rolf Freimann
- 专利权人： CARL ZEISS SMT AG
- 当前专利权人： CARL ZEISS SMT AG
- 主分类号： G02B9/60
- IPC分类号： G02B9/60 ; G02B3/00
摘要：
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8
公开/授权文献
- US07382540B2 Refractive projection objective 公开/授权日：2008-06-03