Invention Application
US20070248891A1 Method of manufacturing field emission display (FED) using half tone photomask 审中-公开
使用半色调光掩模制造场发射显示(FED)的方法

  • Patent Title: Method of manufacturing field emission display (FED) using half tone photomask
  • Patent Title (中): 使用半色调光掩模制造场发射显示(FED)的方法
  • Application No.: US11540639
    Application Date: 2006-10-02
  • Publication No.: US20070248891A1
    Publication Date: 2007-10-25
  • Inventor: In-Taek Han
  • Applicant: In-Taek Han
  • Priority: KR10-2006-0035365 20060419
  • Main IPC: G03F1/00
  • IPC: G03F1/00
Method of manufacturing field emission display (FED) using half tone photomask
Abstract:
A method of manufacturing a Field Emission Display (FED) having a double gate structure using a half tone photomask includes sequentially forming a cathode material layer, a resistance material layer, and a photoresist on a substrate, arranging a half tone photomask on the photoresist, the half tone photomask having a first pattern that shields light and a second pattern that partially transmits light formed in respective predetermined shapes, exposing the photoresist to light to develop it, forming a resistance layer and a cathode electrode by sequentially etching the resistance material layer and the cathode material layer exposed through the developed photoresist, etching the developed photoresist until the resistance layer located on an upper part of a pad region of the cathode electrode is exposed, exposing the pad region of the cathode electrode by etching the resistance layer exposed through the etched photoresist, and removing the photoresist.
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