公开(公告)号：US20080211101A1

公开(公告)日：2008-09-04

申请号：US11785588

申请日：2007-04-18

Applicant: In-Taek Han ,  Ha-Jin Kim

Inventor： In-Taek Han ,  Ha-Jin Kim

IPC: H01L23/48 ,  H01L21/44

CPC classification number: H01L21/76885 ,  B82Y10/00 ,  B82Y30/00 ,  H01L23/5226 ,  H01L23/53276 ,  H01L2221/1094 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Provided is an interlayer wiring structure of a semiconductor device using carbon nanotubes, and a method of manufacturing the interlayer wiring structure. The interlayer wiring structure is a carbon nanotube bundle that connects a first electrode to a second electrode. The carbon nanotube bundle includes a plurality of carbon nanotubes grown from a catalyst layer that is formed on a first electrode. The carbon nanotube bundle is made in a manner that a portion of the carbon nanotube bundle close to the second electrode has higher density of carbon nanotubes than another portion of the carbon nanotube bundle close to the first electrode. The carbon nanotube bundle is surrounded by an interlayer dielectric. In one embodiment of a method of manufacturing the carbon nanotube interlayer wire, liquid droplets are distributed between the carbon nanotubes to induce surface tension between the carbon nanotubes. The surface tension makes the carbon nanotube bundle maintain higher density of carbon nanotubes in a portion close to the second electrode.

Abstract translation: 提供了使用碳纳米管的半导体器件的层间布线结构以及制造层间布线结构的方法。 层间布线结构是将第一电极连接到第二电极的碳纳米管束。 碳纳米管束包括从形成在第一电极上的催化剂层生长的多个碳纳米管。 碳纳米管束的制造方式是使碳纳米管束靠近第二电极的部分比碳纳米管束的靠近第一电极的另一部分具有更高的碳纳米管密度。 碳纳米管束被层间电介质包围。 在制造碳纳米管夹层线的方法的一个实施例中，液滴分布在碳纳米管之间以引起碳纳米管之间的表面张力。 表面张力使得碳纳米管束在靠近第二电极的部分保持较高的碳纳米管密度。

公开(公告)号：US20070080625A1

公开(公告)日：2007-04-12

申请号：US11449738

申请日：2006-06-09

Applicant: Shang-Hyeun Park ,  Jeong-Hee Lee ,  Yong-Wan Jin ,  In-Taek Han ,  Jeong-Na Heo ,  Tae-Won Jeong

Inventor： Shang-Hyeun Park ,  Jeong-Hee Lee ,  Yong-Wan Jin ,  In-Taek Han ,  Jeong-Na Heo ,  Tae-Won Jeong

IPC: H01J63/04 ,  H01J1/62

CPC classification number: H01J31/123 ,  H01J31/127

Abstract: A display device includes: a first substrate and a second substrate, a plurality of first electrodes, a light emitting layer, and a plurality of second electrodes. The first and second substrates are spaced apart to face each other, and the plurality of first electrodes are formed on an inner surface of the first substrate. The light emitting layer is arranged on the plurality of first electrodes and includes phosphor bodies and light emitting sources mixed therein. The plurality of second electrodes are arranged on an inner surface of the second substrate.

Abstract translation: 显示装置包括：第一基板和第二基板，多个第一电极，发光层和多个第二电极。 第一和第二基板间隔开以面对彼此，并且多个第一电极形成在第一基板的内表面上。 发光层布置在多个第一电极上，并且包括混合在其中的荧光体和发光源。 多个第二电极布置在第二基板的内表面上。

公开(公告)号：US20060067872A1

公开(公告)日：2006-03-30

申请号：US11171247

申请日：2005-07-01

Applicant: Ha-Jin Kim ,  In-Taek Han

Inventor： Ha-Jin Kim ,  In-Taek Han

IPC: D01F9/12 ,  B01J21/18

CPC classification number: B01J37/086 ,  B01J21/185 ,  B01J23/12 ,  B01J23/22 ,  B01J23/28 ,  B01J23/70 ,  B82Y30/00 ,  D01F9/127

Abstract: A novel method of forming a catalyst base that can control the growth density of carbon nanotubes and increase the uniformity of the carbon nanotubes and a method of synthesizing carbon nanotubes employing the method of forming the catalyst base are provided. A precursor paste containing a catalytic metal precursor, a solid and a vehicle is applied on a substrate; and the catalytic metal precursor of the precursor paste applied on the substrate is reduced to form catalytic metal particles. According to the present invention, the growth density of carbon nanotubes can be easily controlled and carbon nanotubes with smaller and uniform diameters can be formed.

Abstract translation: 提供了形成能够控制碳纳米管的生长密度并增加碳纳米管的均匀性的催化剂基质的新方法和使用形成催化剂基底的方法合成碳纳米管的方法。 将含有催化金属前体，固体和载体的前体浆料涂覆在基材上; 并且将施加在基板上的前体浆料的催化金属前体还原以形成催化金属颗粒。 根据本发明，可以容易地控制碳纳米管的生长密度，并且可以形成具有更小和均匀直径的碳纳米管。

公开(公告)号：US20050258739A1

公开(公告)日：2005-11-24

申请号：US11130264

申请日：2005-05-17

Applicant: Young-Jun Park ,  Yong-Wan Jin ,  In-Taek Han

Inventor： Young-Jun Park ,  Yong-Wan Jin ,  In-Taek Han

IPC: H01J31/12 ,  H01J1/02 ,  H01J1/30 ,  H01J1/304 ,  H01J3/02 ,  H01J29/48

CPC classification number: B82Y10/00 ,  H01J3/022 ,  H01J29/481 ,  H01J2201/30469

Abstract: A field emission device and a field emission display (FED) using the same and a method of making the field emission device. The FED includes a glass substrate, a layer of a material formed on the glass substrate and having a concave portion, a cathode electrode formed on the material layer and also having a concave portion, electron emitters formed on the concave portion of the cathode electrode, a gate insulating layer formed on the cathode electrode and having a cavity communicating with the concave portion, and a gate electrode formed on the gate insulating layer and having a gate aperture aligned with the cavity.

Abstract translation: 场发射器件和使用其的场致发射显示器（FED）以及制造场致发射器件的方法。 FED包括玻璃基板，形成在玻璃基板上的具有凹部的材料层，形成在材料层上的阴极，还具有凹部，形成在阴极电极的凹部上的电子发射体， 形成在所述阴极电极上且具有与所述凹部连通的空腔的栅极绝缘层，以及形成在所述栅极绝缘层上并具有与所述空腔对准的栅极孔的栅电极。

公开(公告)号：US07501146B2

公开(公告)日：2009-03-10

申请号：US11244106

申请日：2005-10-06

Applicant: Hang-Woo Lee ,  Yong-Wan Jin ,  In-Taek Han ,  Ha-Jin Kim ,  Min-Jong Bae

Inventor： Hang-Woo Lee ,  Yong-Wan Jin ,  In-Taek Han ,  Ha-Jin Kim ,  Min-Jong Bae

IPC: B05D5/00 ,  B05D5/12 ,  H01J9/00

CPC classification number: H01J29/481 ,  B82Y10/00 ,  B82Y30/00 ,  H01J1/304 ,  H01J3/022 ,  H01J9/025 ,  H01J31/127 ,  H01J2201/30469 ,  Y10S977/84 ,  Y10S977/842 ,  Y10S977/847 ,  Y10S977/89

Abstract: A carbon nanotube emitter and its fabrication method, a Field Emission Device (FED) using the carbon nanotube emitter and its fabrication method include a carbon nanotube emitter having a plurality of first carbon nanotubes arranged on a substrate and in parallel with the substrate, and a plurality of the second carbon nanotubes arranged on a surface of the first carbon nanotubes.

Abstract translation: 碳纳米管发射体及其制造方法，使用碳纳米管发射体的场发射器件（FED）及其制造方法包括具有布置在衬底上并与衬底平行的多个第一碳纳米管的碳纳米管发射体， 多个第二碳纳米管布置在第一碳纳米管的表面上。

公开(公告)号：US07495377B2

公开(公告)日：2009-02-24

申请号：US11131222

申请日：2005-05-18

Applicant: In-Taek Han ,  Tae-Sik Oh ,  Ha-Jin Kim ,  Andrei Zoulkarneev ,  Jong-Min Kim

Inventor： In-Taek Han ,  Tae-Sik Oh ,  Ha-Jin Kim ,  Andrei Zoulkarneev ,  Jong-Min Kim

IPC: H01J1/02

CPC classification number: B82Y10/00 ,  H01J9/025 ,  H01J29/06 ,  H01J29/481

Abstract: A Field Emission Display (FED) and a method of manufacturing the FED are provided. The FED includes a substrate; a plurality of under-gate electrodes formed parallel to one another on a top surface of a substrate; a plurality of cathode electrodes formed perpendicular to the under-gate electrodes on an upper portion of the under-gate electrode, each of cathode holes being formed in portions of the cathode electrodes that intersect with the under-gate electrodes; a plurality of emitters formed symmetrical with respect to centers of the cathode holes on the cathode electrodes; and a plurality of gate electrodes formed to be electrically connected to the under-gate electrodes in central portions of the cathode holes.

公开(公告)号：US07432217B1

公开(公告)日：2008-10-07

申请号：US11473070

申请日：2006-06-23

Applicant: Ha-Jin Kim ,  In-Taek Han

Inventor： Ha-Jin Kim ,  In-Taek Han

IPC: H01H21/31

CPC classification number: B82Y40/00 ,  B82Y30/00 ,  C01B32/16 ,  C01B32/168 ,  C01B2202/34 ,  H01J29/86 ,  H01J31/127 ,  H01J2201/30469

Abstract: In a method of achieving uniform lengths of Carbon NanoTubes (CNTs) and a method of manufacturing a Field Emission Device (FED) using such CNTs, an organic film is coated to cover CNTs formed on a predetermined material layer. The organic film is etched to a predetermined depth to remove projected portions of the CNTs. After that, the organic film is removed.

Abstract translation: 在实现均匀长度的碳纳米管（CNT）的方法和使用这种CNT制造场致发射器件（FED）的方法中，涂覆有机膜以覆盖形成在预定材料层上的CNT。 将有机膜蚀刻到预定深度以去除CNT的突出部分。 之后，除去有机膜。

公开(公告)号：US07382090B2

公开(公告)日：2008-06-03

申请号：US11130264

申请日：2005-05-17

Applicant: Young-Jun Park ,  Yong-Wan Jin ,  In-Taek Han

Inventor： Young-Jun Park ,  Yong-Wan Jin ,  In-Taek Han

IPC: H01J17/30

CPC classification number: B82Y10/00 ,  H01J3/022 ,  H01J29/481 ,  H01J2201/30469

Abstract: A field emission device and a field emission display (FED) using the same and a method of making the field emission device. The FED includes a glass substrate, a layer of a material formed on the glass substrate and having a concave portion, a cathode electrode formed on the material layer and also having a concave portion, electron emitters formed on the concave portion of the cathode electrode, a gate insulating layer formed on the cathode electrode and having a cavity communicating with the concave portion, and a gate electrode formed on the gate insulating layer and having a gate aperture aligned with the cavity.

Abstract translation: 场发射器件和使用其的场致发射显示器（FED）以及制造场致发射器件的方法。 FED包括玻璃基板，形成在玻璃基板上的具有凹部的材料层，形成在材料层上的阴极，还具有凹部，形成在阴极电极的凹部上的电子发射体， 形成在所述阴极电极上且具有与所述凹部连通的空腔的栅极绝缘层，以及形成在所述栅极绝缘层上并具有与所述空腔对准的栅极孔的栅电极。

公开(公告)号：US20080003733A1

公开(公告)日：2008-01-03

申请号：US11656370

申请日：2007-01-23

Applicant: Ha-Jin Kim ,  In-Taek Han ,  Young-Chul Choi ,  Kwang-Seok Jeong

Inventor： Ha-Jin Kim ,  In-Taek Han ,  Young-Chul Choi ,  Kwang-Seok Jeong

IPC: H01L21/8234

CPC classification number: H01J9/025 ,  Y10S977/742 ,  Y10S977/842 ,  Y10S977/938 ,  Y10S977/939

Abstract: A method of forming a Carbon NanoTube (CNT) structure and a method of manufacturing a Field Emission Device (FED) using the method of forming a CNT structure includes: forming an electrode on a substrate, forming a buffer layer on the electrode, forming a catalyst layer in a particle shape on the buffer layer, etching the buffer layer exposed through the catalyst layer, and growing CNTs from the catalyst layer formed on the etched buffer layer.

Abstract translation: 使用形成CNT结构的方法形成碳纳米管（CNT）结构的方法和制造场致发射器件（FED）的方法包括：在基板上形成电极，在电极上形成缓冲层，形成 在缓冲层上形成颗粒形状的催化剂层，蚀刻通过催化剂层暴露的缓冲层，以及从形成在蚀刻缓冲层上的催化剂层生长CNT。

公开(公告)号：US20070248891A1

公开(公告)日：2007-10-25

申请号：US11540639

申请日：2006-10-02

Applicant: In-Taek Han

Inventor： In-Taek Han

IPC: G03F1/00

CPC classification number: H01J31/127 ,  H01J9/025

Abstract: A method of manufacturing a Field Emission Display (FED) having a double gate structure using a half tone photomask includes sequentially forming a cathode material layer, a resistance material layer, and a photoresist on a substrate, arranging a half tone photomask on the photoresist, the half tone photomask having a first pattern that shields light and a second pattern that partially transmits light formed in respective predetermined shapes, exposing the photoresist to light to develop it, forming a resistance layer and a cathode electrode by sequentially etching the resistance material layer and the cathode material layer exposed through the developed photoresist, etching the developed photoresist until the resistance layer located on an upper part of a pad region of the cathode electrode is exposed, exposing the pad region of the cathode electrode by etching the resistance layer exposed through the etched photoresist, and removing the photoresist.

Abstract translation: 使用半色调光掩模制造具有双栅极结构的场发射显示器（FED）的方法包括在衬底上顺序形成阴极材料层，电阻材料层和光致抗蚀剂，将半色调光掩模布置在光致抗蚀剂上， 所述半色调光掩模具有屏蔽光的第一图案和部分透射以各个预定形状形成的光的第二图案，将光致抗蚀剂曝光以显影，通过依次蚀刻电阻材料层和形成电阻层和阴极， 阴极材料层通过显影的光致抗蚀剂暴露，蚀刻显影的光致抗蚀剂，直到位于阴极电极的焊盘区域的上部的电阻层被暴露，通过蚀刻暴露于阴极电极的电阻层而露出阴极电极的焊盘区域 蚀刻的光致抗蚀剂，并除去光致抗蚀剂。