发明申请
- 专利标题: Cleanroom-Capable Coating System
- 专利标题(中): 无尘室涂层系统
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申请号: US11572254申请日: 2005-07-14
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公开(公告)号: US20070251458A1公开(公告)日: 2007-11-01
- 发明人: Dietrich Mund , Wolfgang Fukarek , Jurgen Leib
- 申请人: Dietrich Mund , Wolfgang Fukarek , Jurgen Leib
- 申请人地址: DE 55122 Mainz
- 专利权人: SCHOTT AG
- 当前专利权人: SCHOTT AG
- 当前专利权人地址: DE 55122 Mainz
- 优先权: DE102004035336.0 20040721
- 国际申请: PCT/EP05/07653 WO 20050714
- 主分类号: C23C14/56
- IPC分类号: C23C14/56
摘要:
The invention relates to a cleanroom-capable coating system for PVD or CVD processes having at least one vacuum coating chamber, in which vitreous, glass-ceramic and/or ceramic layers deposited. A first opening of the vacuum coating chamber is connected via a separately evacuable vacuum airlock chamber (load lock) to a cleanroom, the vacuum airlock chamber comprising transport means for delivering substrates into the vacuum coating chamber and for taking substrates out of the vacuum coating chamber, and a second opening of the vacuum coating chamber connects the vacuum coating chamber to a grayroom area separated from the cleanroom.
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