A process for the production of trialkoxyhalosilanes which comprises reacting a tetrahalosilane [37] with a tetra-alkoxysilane [38] in the presence of an alcohol whose alkoxy group is the same as those of the tetraalkoxysilane to thereby obtain a trialkoxyhalosilane [39], characterized in that the alcohol is used in an amount of 5 to 50% by mole based on the total amount of Si of the tetrahalosilane and the tetraalkoxysilane: SiX4[37] (wherein X is halogeno) Si(OR1)4[38] (wherein R1 is a hydrocarbon group having 1 to 6 carbon atoms) XSi(OR1)3[39] (wherein X and R1 are each as defined above).