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公开(公告)号:US12071688B2
公开(公告)日:2024-08-27
申请号:US17214701
申请日:2021-03-26
申请人: ENTEGRIS, INC.
发明人: SangJin Lee , DaHye Kim , Sungsil Cho , Seobong Chang , Jae Eon Park , Bryan C. Hendrix , Thomas H. Baum , SooJin Lee
CPC分类号: C23C16/45553 , C07F7/025 , C07F7/10 , C23C16/345 , C23C16/402 , C23C16/45536 , C23C16/50 , H01L21/02219 , H01L21/02274 , H01L21/0228 , H01L21/02164 , H01L21/0217
摘要: Provided are certain liquid silicon precursors useful for the deposition of silicon-containing films, such as films comprising silicon, silicon nitride, silicon oxynitride, silicon dioxide, silicon carbide, carbon-doped silicon nitride, or carbon-doped silicon oxynitride. Also provided are methods for forming such films utilizing vapor deposition techniques.
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公开(公告)号:US12031209B2
公开(公告)日:2024-07-09
申请号:US17176984
申请日:2021-02-16
CPC分类号: C23C16/45553 , C07F7/003 , C07F7/025 , C07F7/2224 , C07F7/2284 , C07F7/30 , C23C16/18 , C23C16/45534
摘要: Methods of forming a metal film having a metal halide with a reducing agent are disclosed. The reducing agent, the reducing agent includes a group IV element containing heterocyclic compound, a radical initiator, an alkly alane, a diborene species and/or a Sn(II) compound.
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公开(公告)号:US20230287015A1
公开(公告)日:2023-09-14
申请号:US18195937
申请日:2023-05-10
发明人: Byung K. HWANG , Xiaobing ZHOU
IPC分类号: C07F7/02 , C01B21/068 , C01B33/12 , C23C16/34 , C23C16/40 , C23C16/455
CPC分类号: C07F7/025 , C01B21/068 , C01B33/126 , C23C16/345 , C23C16/402 , C23C16/45525
摘要: A 1,1,1-tris(organoamino)disilane compound and a method of preparing the 1,1,1-tris(organoamino)disilane compound are disclosed. The method comprises aminating a 1,1,1-trihalodisilane with an aminating agent comprising an organoamine compound to give a reaction product comprising the 1,1,1-tris(organoamino)disilane compound, thereby preparing the 1,1,1-tris(organoamino)disilane compound. A film-forming composition is also disclosed. The film-forming composition comprises the 1,1,1-tris(organoamino)disilane compound. A film formed with the film-forming composition, and a method of forming the film, are also disclosed. The method of forming the film comprises subjecting the film-forming composition comprising the 1,1,1-tris(organoamino)disilane compound to a deposition condition in the presence of a substrate, thereby forming the film on the substrate.
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公开(公告)号:US11702743B2
公开(公告)日:2023-07-18
申请号:US17373424
申请日:2021-07-12
发明人: Xinjian Lei , Matthew R. MacDonald , Meiliang Wang
IPC分类号: C23C16/455 , C23C16/40 , C23C16/34 , C07F7/02 , C07F7/10
CPC分类号: C23C16/45553 , C23C16/345 , C23C16/402 , C23C16/45542 , C07F7/025 , C07F7/10
摘要: Described herein are compositions and methods for forming silicon and oxygen containing films. In one aspect, the film is deposited from at least one precursor, wherein the at least one precursor selected from the group consisting of Formula C:
as defined herein.-
公开(公告)号:US11691993B2
公开(公告)日:2023-07-04
申请号:US16635452
申请日:2018-07-30
发明人: Byung K. Hwang , Xiaobing Zhou
IPC分类号: C07F7/02 , C01B21/068 , C01B33/12 , C23C16/34 , C23C16/40 , C23C16/455
CPC分类号: C07F7/025 , C01B21/068 , C01B33/126 , C23C16/345 , C23C16/402 , C23C16/45525
摘要: A 1,1,1-tris(organoamino)disilane compound and a method of preparing the 1,1,1-tris(organoamino)disilane compound are disclosed. The method comprises aminating a 1,1,1-trihalodisilane with an aminating agent comprising an organoamine compound to give a reaction product comprising the 1,1,1-tris(organoamino)disilane compound, thereby preparing the 1,1,1-tris(organoamino)disilane compound. A film-forming composition is also disclosed. The film-forming composition comprises the 1,1,1-tris(organoamino)disilane compound. A film formed with the film-forming composition, and a method of forming the film, are also disclosed. The method of forming the film comprises subjecting the film-forming composition comprising the 1,1,1-tris(organoamino)disilane compound to a deposition condition in the presence of a substrate, thereby forming the film on the substrate.
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公开(公告)号:US20230183272A1
公开(公告)日:2023-06-15
申请号:US18152116
申请日:2023-01-09
发明人: XINJIAN LEI , MATTHEW R. MCDONALD , MANCHAO XIAO , MING LI , MEILIANG WANG
CPC分类号: C07F7/025 , C23C16/36 , C23C16/50 , C23C16/345 , C23C16/4408 , C23C16/45536 , C23C16/45553
摘要: Described herein are precursors and methods for forming silicon-containing films. In one aspect, there is provided a precursor of Formula I:
as described herein.-
公开(公告)号:US20230048977A1
公开(公告)日:2023-02-16
申请号:US17933492
申请日:2022-09-20
摘要: A trichlorogermanide of formula (I): [R4N]/[R4P]Cl[GeCl3] (I), where R is Me, Et, iPr, nBu, or Ph, tris(trichlorosilyl)germanide of formula (II): [R4N]/[R4P][Ge(SiCl3)3] (II), where R is Me, Et, iPr, nBu, or Ph, a tris(trichlorosilyl)germanide adduct of GaCl3 of formula (III): [Ph4P][Ge(SiCl3)3*GaCl3], and a tris(trichlorosilyl)germanide adduct of BBr3 of formula (IV): [Ph4P][Ge(SiCl3)3*BBr3]. Also, methods for preparing the trichlorogermanides of formula (I), the tris(trichlorosilyl)germanide of formula (II), the tris(trichlorosilyl)germanide adduct of BBr3 of formula (IV).
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公开(公告)号:US20220363697A1
公开(公告)日:2022-11-17
申请号:US17774199
申请日:2020-10-20
发明人: Jae Yoon PARK , Hyun Jin PARK , Hong Ki LEE , Ja Won KIM
摘要: The present invention relates to a colorant for a heat transfer fluid and a composition comprising same.
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公开(公告)号:US11447507B2
公开(公告)日:2022-09-20
申请号:US15158356
申请日:2016-05-18
IPC分类号: C07F7/18 , C08K5/5415 , B01D53/82 , B01D53/50 , C07D251/24 , C07F7/02 , B01J20/28 , B01J20/22 , B01D53/02 , C08K5/3492 , B01J20/32 , C07F7/08 , C02F1/28 , B01D53/48 , B01D39/04 , C02F101/10 , C02F103/10 , C02F103/36
摘要: Materials which react with (“scavenge”) sulfur compounds, such as hydrogen sulfide and mercaptans, are useful for limiting sulfur-induced corrosion. Surface-modified particles incorporating a hexahydrotriazine moiety are disclosed and used as sulfur scavengers. These surface-modified particles are used a filter media in fixed filter systems and as additives to fluids including sulfur compounds. The hexahydrotriazine moiety can react with sulfur compounds in such a manner as to bind sulfur atoms to the surface-modified particles, thus allowing removal of the sulfur atoms from fluids such as crude oil, natural gas, hydrocarbon combustion exhaust gases, sulfur polluted air and water. The surface-modified particles may, in general, be sized to allow separation of the particles from the process fluid by sedimentation, size-exclusion filtration or the like.
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公开(公告)号:US11406662B2
公开(公告)日:2022-08-09
申请号:US16850468
申请日:2020-04-16
申请人: ZS PHARMA, INC.
IPC分类号: A61K33/24 , B01J39/14 , B01J39/02 , C01B39/00 , A61K9/14 , A61K33/00 , A61K45/06 , C01B33/20 , B01J19/00 , B01J19/18 , A61K33/244 , C07F7/02 , C01B39/46 , C01B39/02
摘要: The present invention relates to novel microporous zirconium silicate compositions that are formulated to remove toxins, e.g. potassium ions, from the gastrointestinal tract at an elevated rate without causing undesirable side effects. The preferred formulations are designed avoid increase in pH of urine in patients and/or avoid potential entry of particles into the bloodstream of the patient. Also disclosed is a method for preparing high purity crystals of UZSi-9 exhibiting an enhanced level of potassium exchange capacity. These compositions are particularly useful in the therapeutic treatment of hyperkalemia.
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