Invention Application
- Patent Title: SEM test apparatus
- Patent Title (中): SEM试验装置
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Application No.: US11418081Application Date: 2006-05-05
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Publication No.: US20070256472A1Publication Date: 2007-11-08
- Inventor: Jonathan Gorrell , Mark Davidson , Jean Tokarz
- Applicant: Jonathan Gorrell , Mark Davidson , Jean Tokarz
- Applicant Address: US VI St. Thomas
- Assignee: Virgin Islands Microsystems, Inc.
- Current Assignee: Virgin Islands Microsystems, Inc.
- Current Assignee Address: US VI St. Thomas
- Main IPC: G01V13/00
- IPC: G01V13/00
Abstract:
Test apparatus for examining the operation and functioning of ultra-small resonant structures, and specifically using an SEM as the testing device and its electron beam as an exciting source of charged particles to cause the ultra-small resonant structures to resonate and produce EMR.
Public/Granted literature
- US07436177B2 SEM test apparatus Public/Granted day:2008-10-14
Information query
