公开(公告)号：US07758739B2

公开(公告)日：2010-07-20

申请号：US11433486

申请日：2006-05-15

申请人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Michael E. Maines ,  Andres Trucco ,  Paul Hart

发明人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Michael E. Maines ,  Andres Trucco ,  Paul Hart

IPC分类号： H01L21/461 ,  H01L21/302

CPC分类号： H01S3/09 ,  B82Y20/00 ,  H01L21/32136 ,  H01L21/32139 ,  H01S3/0903 ,  Y10S977/949 ,  Y10S977/95 ,  Y10S977/954

摘要： We describe an ultra-small structure and a method of producing the same. The structures produce visible light of varying frequency, from a single metallic layer. In one example, a row of metallic posts are etched or plated on a substrate according to a particular geometry. When a charged particle beam passed close by the row of posts, the posts and cavities between them cooperate to resonate and produce radiation in the visible spectrum (or even higher). A plurality of such rows of different geometries are formed by either etching or plating from a single metal layer such that the charged particle beam will yield different visible light frequencies (i.e., different colors) using different ones of the rows.

摘要翻译： 我们描述一种超小结构及其制造方法。 该结构从单个金属层产生变化​​频率的可见光。 在一个示例中，根据特定几何形状，一排金属柱被蚀刻或镀在基板上。 当带电粒子束通过柱的一列通过时，它们之间的柱和腔合作以共振并产生可见光谱（甚至更高）中的辐射。 通过从单个金属层进行蚀刻或电镀形成多个不同几何形状的行，使得带电粒子束将使用不同的行产生不同的可见光频率（即，不同的颜色）。

公开(公告)号：US07436177B2

公开(公告)日：2008-10-14

申请号：US11418081

申请日：2006-05-05

申请人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz

发明人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz

IPC分类号： H01J25/50

CPC分类号： G01N23/225 ,  H01J25/00 ,  H01J2237/2813

摘要： Test apparatus for examining the operation and functioning of ultra-small resonant structures, and specifically using an SEM as the testing device and its electron beam as an exciting source of charged particles to cause the ultra-small resonant structures to resonate and produce EMR.

摘要翻译： 用于检查超小谐振结构的操作和功能的测试装置，并且具体使用SEM作为测试装置，并且其电子束作为带电粒子的激发源，以使超小谐振结构共振并产生EMR。

公开(公告)号：US20070258690A1

公开(公告)日：2007-11-08

申请号：US11418244

申请日：2006-05-05

申请人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

发明人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

IPC分类号： G02B6/10

CPC分类号： G02B6/1226 ,  B82Y20/00 ,  G02B6/4202

摘要： A device includes an integrated circuit (IC) and at least one ultra-small resonant structure and a detection mechanism are formed on said IC. At least the ultra-small resonant structure portion of the device is vacuum packaged. The ultra-small resonant structure includes a plasmon detector having a transmission line. The detector mechanism includes a generator mechanism constructed and adapted to generate a beam of charged particles along a path adjacent to the transmission line; and a detector microcircuit disposed along said path, at a location after said beam has gone past said line, wherein the generator mechanism and the detector microcircuit are disposed adjacent transmission line and wherein a beam of charged particles from the generator mechanism to the detector microcircuit electrically couples a plasmon wave traveling along the metal transmission line to the microcircuit. The detector mechanism may be electrically connected to the underlying IC.

摘要翻译： 一种器件包括集成电路（IC），并且至少一个超小型谐振结构和检测机构形成在所述IC上。 至少装置的超小型谐振结构部分被真空包装。 超小型谐振结构包括具有传输线的等离子体检测器。 检测器机构包括一个发生器机构，其被构造和适于沿着与传输线相邻的路径产生带电粒子束; 以及沿着所述路径设置在所述光束已经经过所述线之后的位置处的检测器微电路，其中所述发生器机构和所述检测器微电路邻近传输线设置，并且其中从发生器机构到所述检测器微电路的带电粒子束电 将沿着金属传输线行进的等离子体波耦合到微电路。 检测器机构可以电连接到底层IC。

公开(公告)号：US20070257620A1

公开(公告)日：2007-11-08

申请号：US11418123

申请日：2006-05-05

申请人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz

发明人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz

IPC分类号： H01J25/10

CPC分类号： H01J25/78 ,  B82Y20/00 ,  B82Y30/00

摘要： A nano-resonating structure constructed and adapted to couple energy from a beam of charged particles into said nano-resonating structure and to transmit coupled energy outside the nano-resonating structure. A plurality of the nano-resonant substructures may be formed adjacent one another in a stacked array, and each may have various shapes, including segmented portions of shaped structures, circular, semi-circular, oval, square, rectangular, semi-rectangular, C-shaped, U-shaped and other shapes as well as designs having a segmented outer surface or area, and arranged in a vertically stacked array comprised of one or more ultra-small resonant structures. The vertically stacked arrays may be symmetric or asymmetric, tilted, and/or staggered.

摘要翻译： 纳米谐振结构构造并适于将来自带电粒子束的能量耦合到所述纳米谐振结构中并在纳米谐振结构外部传输耦合能量。 多个纳米谐振子结构可以以堆叠的阵列形式彼此相邻地形成，并且每个可以具有各种形状，包括成形结构的分段部分，圆形，半圆形，椭圆形，正方形，矩形，半矩形，C U形和其他形状以及具有分段外表面或区域的设计，并且布置在由一个或多个超小型谐振结构构成的垂直堆叠阵列中。 垂直堆叠的阵列可以是对称的或不对称的，倾斜的和/或交错的。

公开(公告)号：US20060216940A1

公开(公告)日：2006-09-28

申请号：US11433486

申请日：2006-05-15

申请人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Michael Maines ,  Andres Trucco ,  Paul Hart

发明人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Michael Maines ,  Andres Trucco ,  Paul Hart

IPC分类号： H01L21/461 ,  H01L21/302

CPC分类号： H01S3/09 ,  B82Y20/00 ,  H01L21/32136 ,  H01L21/32139 ,  H01S3/0903 ,  Y10S977/949 ,  Y10S977/95 ,  Y10S977/954

摘要： We describe an ultra-small structure and a method of producing the same. The structures produce visible light of varying frequency, from a single metallic layer. In one example, a row of metallic posts are etched or plated on a substrate according to a particular geometry. When a charged particle beam passed close by the row of posts, the posts and cavities between them cooperate to resonate and produce radiation in the visible spectrum (or even higher). A plurality of such rows of different geometries are formed by either etching or plating from a single metal layer such that the charged particle beam will yield different visible light frequencies (i.e., different colors) using different ones of the rows.

摘要翻译： 我们描述一种超小结构及其制造方法。 该结构从单个金属层产生变化​​频率的可见光。 在一个示例中，根据特定几何形状，一排金属柱被蚀刻或镀在基板上。 当带电粒子束通过柱的一列通过时，它们之间的柱和腔合作以共振并产生可见光谱（甚至更高）中的辐射。 通过从单个金属层进行蚀刻或电镀形成多个不同几何形状的行，使得带电粒子束将使用不同的行产生不同的可见光频率（即，不同的颜色）。

公开(公告)号：US07573045B2

公开(公告)日：2009-08-11

申请号：US11798554

申请日：2007-05-15

申请人： Jonathan Gorrell ,  Jean Tokarz ,  Michael E. Maines ,  Mark Davidson

发明人： Jonathan Gorrell ,  Jean Tokarz ,  Michael E. Maines ,  Mark Davidson

IPC分类号： H01J3/30

CPC分类号： G02B6/1226 ,  B82Y20/00 ,  H01J25/00

摘要： Nanoantennas are formed on a substrate (e.g., silicon) and generate light via interactions with a charged particle beam, where the frequency of the generated light is based in large part on the periodicity of the “fingers” that make up the nanoantennas. Each finger has typical dimensions of less than 100 nm on the shorter side and typically less than 500 nm on the longer, but the size of the optimal longer side is determined by the electron velocity. The charged particle may be an electron beam or any other source of charged particles. By utilizing fine-line lithography on the surface of the substrate, the nanoantennas can be formed without the need for complicated silicon devices.

摘要翻译： 纳米天线形成在基底（例如硅）上，并且通过与带电粒子束的相互作用产生光，其中所产生的光的频率大部分基于构成纳米天线的“手指”的周期性。 每个手指在较短的侧面具有小于100nm的典型尺寸，并且通常在较长的时间上通常小于500nm，但是最佳长边的尺寸由电子速度确定。 带电粒子可以是电子束或任何其他带电粒子源。 通过在基板的表面上利用细线光刻，可以形成纳米天线，而不需要复杂的硅器件。

公开(公告)号：US07728397B2

公开(公告)日：2010-06-01

申请号：US11418123

申请日：2006-05-05

申请人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz

发明人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz

IPC分类号： G09G3/06

CPC分类号： H01J25/78 ,  B82Y20/00 ,  B82Y30/00

摘要： A nano-resonating structure constructed and adapted to couple energy from a beam of charged particles into said nano-resonating structure and to transmit coupled energy outside the nano-resonating structure. A plurality of the nano-resonant substructures may be formed adjacent one another in a stacked array, and each may have various shapes, including segmented portions of shaped structures, circular, semi-circular, oval, square, rectangular, semi-rectangular, C-shaped, U-shaped and other shapes as well as designs having a segmented outer surface or area, and arranged in a vertically stacked array comprised of one or more ultra-small resonant structures. The vertically stacked arrays may be symmetric or asymmetric, tilted, and/or staggered.

摘要翻译： 纳米谐振结构构造并适于将来自带电粒子束的能量耦合到所述纳米谐振结构中并在纳米谐振结构外部传输耦合能量。 多个纳米谐振子结构可以以堆叠的阵列形式彼此相邻地形成，并且每个可以具有各种形状，包括成形结构的分段部分，圆形，半圆形，椭圆形，正方形，矩形，半矩形，C U形和其他形状以及具有分段外表面或区域的设计，并且布置在由一个或多个超小型谐振结构构成的垂直堆叠阵列中。 垂直堆叠的阵列可以是对称的或不对称的，倾斜的和/或交错的。

公开(公告)号：US07710040B2

公开(公告)日：2010-05-04

申请号：US11418080

申请日：2006-05-05

申请人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Andres Trucco

发明人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Andres Trucco

IPC分类号： H01J25/10

CPC分类号： H01J25/00

摘要： An array of ultra-small structures of between ones of nanometers to hundreds of micrometers in size that can be energized to produce at least two different frequencies of out put energy or data, with the ultra small structures being formed on a single conductive layer on a substrate. The array can include one row of different ultra small structures, multiple rows of ultra small structures, with each row containing identical structures, or multiple rows of a variety of structures that can produce all spectrums of energy or combinations thereof, including visible light.

摘要翻译： 一组尺寸为纳米至数百微米之间的超小型结构阵列，可以被激励以产生至少两个不同频率的放出能量或数据，其中超小结构形成在单个导电层上 基质。 该阵列可以包括一排不同的超小结构，多行超小结构，每行包含相同的结构，或者可以产生能量的所有能量或其组合（包括可见光）的各种各样的结构的行。

公开(公告)号：US07558490B2

公开(公告)日：2009-07-07

申请号：US11400280

申请日：2006-04-10

申请人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

发明人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

IPC分类号： H04B10/06 ,  H04B10/02

CPC分类号： G21K1/087 ,  H01J25/00

摘要： An electronic receiver for decoding data encoded into light is described. The light is received at an ultra-small resonant structure. The resonant structure generates an electric field in response to the incident light. An electron beam passing near the resonant structure is altered on at least one characteristic as a result of the electric field. Data is encoded into the light by a characteristic that is seen in the electric field during resonance and therefore in the electron beam as it passes the electric field. Alterations in the electron beam are thus correlated to data values encoded into the light.

摘要翻译： 描述了用于解码编码为光的数据的电子接收器。 光以超小的谐振结构被接收。 谐振结构响应于入射光而产生电场。 通过谐振结构附近的电子束由于电场而在至少一个特性上改变。 数据通过在谐振期间在电场中看到的特性并因此在电子束通过电场时在电子束中被编码成光。 因此，电子束中的变化与编码为光的数据值相关。

公开(公告)号：US07554083B2

公开(公告)日：2009-06-30

申请号：US11418244

申请日：2006-05-05

申请人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

发明人： Jonathan Gorrell ,  Mark Davidson ,  Jean Tokarz ,  Lev Gasparov

IPC分类号： H01J3/26 ,  H04B10/06

CPC分类号： G02B6/1226 ,  B82Y20/00 ,  G02B6/4202

摘要： A device includes an integrated circuit (IC) and at least one ultra-small resonant structure and a detection mechanism are formed on said IC. At least the ultra-small resonant structure portion of the device is vacuum packaged. The ultra-small resonant structure includes a plasmon detector having a transmission line. The detector mechanism includes a generator mechanism constructed and adapted to generate a beam of charged particles along a path adjacent to the transmission line; and a detector microcircuit disposed along said path, at a location after said beam has gone past said line, wherein the generator mechanism and the detector microcircuit are disposed adjacent transmission line and wherein a beam of charged particles from the generator mechanism to the detector microcircuit electrically couples a plasmon wave traveling along the metal transmission line to the microcircuit. The detector mechanism may be electrically connected to the underlying IC.

摘要翻译： 一种器件包括集成电路（IC），并且至少一个超小型谐振结构和检测机构形成在所述IC上。 至少装置的超小型谐振结构部分被真空包装。 超小型谐振结构包括具有传输线的等离子体检测器。 检测器机构包括一个发生器机构，其被构造和适于沿着与传输线相邻的路径产生带电粒子束; 以及沿着所述路径设置在所述光束已经经过所述线之后的位置处的检测器微电路，其中所述发生器机构和所述检测器微电路邻近传输线设置，并且其中从发生器机构到所述检测器微电路的带电粒子束电 将沿着金属传输线行进的等离子体波耦合到微电路。 检测器机构可以电连接到底层IC。