发明申请
US20070257365A1 Packaged Semiconductor Chip Comprising An Integrated Circuit Chip Ablated With Laser And Cut With Saw Blade From Wafer
有权
封装的半导体芯片包括一个集成电路芯片,激光切割与锯片从晶片切割
- 专利标题: Packaged Semiconductor Chip Comprising An Integrated Circuit Chip Ablated With Laser And Cut With Saw Blade From Wafer
- 专利标题(中): 封装的半导体芯片包括一个集成电路芯片,激光切割与锯片从晶片切割
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申请号: US11777878申请日: 2007-07-13
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公开(公告)号: US20070257365A1公开(公告)日: 2007-11-08
- 发明人: Szu Wei Lu , Hsin-Hui Lee , Ming-Chung Sung , Mirng-Ji Lii
- 申请人: Szu Wei Lu , Hsin-Hui Lee , Ming-Chung Sung , Mirng-Ji Lii
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
A packaged semiconductor chip comprising an integrated circuit chip including a low-k dielectric layer and a chip substrate, wherein an edge of the integrated circuit chip has a first edge portion and a second edge portion. At least part of the first edge portion being across a same level as the low-k dielectric layer, and the first edge portion having been laser ablated to have a series of rounded recesses formed therein. The second edge portion being across a same level as at least part of the chip substrate, and the second edge portion having a different surface texture than that of the first edge portion. The packaged semiconductor chip also comprises a packaging substrate having the integrated circuit chip attached and a plurality of solder bumps electrically connecting between the packaging substrate and the integrated circuit chip.
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