发明申请
- 专利标题： Sensor and Method for the Production Thereof
- 专利标题（中）： 传感器及其生产方法
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申请号： US10588559申请日： 2005-02-01
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公开(公告)号： US20070262358A1公开(公告)日： 2007-11-15
- 发明人: Markus Burgmair , Ignaz Eisele , Thorsten Knittel
- 申请人： Markus Burgmair , Ignaz Eisele , Thorsten Knittel
- 优先权： DE102004005927.6 20040206; DE102004035551.7 20040722
- 国际申请： PCT/EP05/50418 WO 20050201
- 主分类号： H01L29/68
- IPC分类号： H01L29/68 ; G01N27/414 ; H01L21/336
摘要：
The invention concerns a sensor with silicon-containing components from whose sensitive detection element electrical signals relevant to a present analyte can be read out by means of a silicon semiconductor system. The invention is characterized in that the silicon-containing components are covered with a layer made of hydrophobic material in order to prevent unwanted signals caused by moisture.
公开/授权文献
- US07719004B2 Sensor having hydrophobic coated elements 公开/授权日：2010-05-18
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