发明申请
US20070262678A1 PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, AND INK JET RECORDING HEAD 有权
压电元件,压电致动器和喷墨记录头

PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, AND INK JET RECORDING HEAD
摘要:
A piezoelectric element having a piezoelectric film and one pair of electrodes being in contact with the piezoelectric film on a substrate, wherein the piezoelectric film has a structure in which a lead-containing piezoelectric film and a lead-free piezoelectric film are laminated, and in the piezoelectric film, a layer furthest from the substrate and a layer closest to the substrate are lead-free piezoelectric films.
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