发明申请
US20070264742A1 Glass substrate and capacitance-type pressure sensor using the same
审中-公开
玻璃基板和电容式压力传感器使用
- 专利标题： Glass substrate and capacitance-type pressure sensor using the same
- 专利标题（中）： 玻璃基板和电容式压力传感器使用
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申请号： US11880345申请日： 2007-07-19
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公开(公告)号： US20070264742A1公开(公告)日： 2007-11-15
- 发明人: Manabu Tamura , Takashi Hatanai , Kazuhiro Soejima , Koichi Takahashi , Munemitsu Abe , Shinji Murata
- 申请人： Manabu Tamura , Takashi Hatanai , Kazuhiro Soejima , Koichi Takahashi , Munemitsu Abe , Shinji Murata
- 专利权人： ALPS ELECTRIC CO., LTD.
- 当前专利权人： ALPS ELECTRIC CO., LTD.
- 优先权： JP2004-196341 20040702; JP2005-125476 20050422
- 主分类号： H01L21/02
- IPC分类号： H01L21/02 ; H01L21/461
摘要：
A glass substrate has a pair of main surfaces opposite to each other. Two island-shaped portions made of silicon are buried in the glass substrate. The tow island-shaped portions are exposed from the two main surfaces of the glass substrate, respectively. An electrode is formed on one main surface of the glass substrate so as to be electrically connected to one exposed portion of one island-shaped portion, and another electrode is formed thereon so as to be electrically connected to one exposed portion of the other island-shaped portion. Still another electrode is formed on the other main surface of the glass substrate so as to be electrically connected to the other exposed portion of the one island-shaped portion. A silicon substrate having a pressure sensing diaphragm is bonded to the other main surface of the glass substrate.
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