摘要:
A gyroscope includes a tuning fork, which includes a plurality of tines formed of a conductive material and a supporting portion; an upper glass substrate and a lower glass substrate which sandwich the tuning fork; drive electrodes which are provided on each of the upper and the lower glass substrates in such a manner that parts of the drive electrodes oppose the tines and the remaining parts protrude from the tines, the drive electrodes being capacitively coupled to the tines and driving the tines in a direction parallel to the substrates; and detection electrodes which are capacitively coupled to the tines, and which detect displacements of the tines in a direction perpendicular to the vibrating direction of the tines.
摘要:
A circuit for driving a liquid crystal panel includes an A/D converter for converting image data to digital data, a shift register for generating horizontal scanning signals, a capacitor group formed of capacitors the number of which corresponds to the number of bits of digital data, a selector for selecting none or at least one capacitor from among the capacitor group on the basis of horizontal scanning signals and digital data, a power-supply section for supplying an electric charge to each capacitor, first switch sections for charging an electric charge to selected capacitors only in every horizontal synchronization period, and second switch sections for connecting all capacitors to their corresponding signal electrodes S in every horizontal synchronization period. Even if the liquid crystal panel is formed into a large screen, neither is its parts mounting surface increased considerably, nor do the costs increase. In addition, a display having a high resolution can be realized with a simple construction.
摘要:
At one side of a substrate, a vertical diffraction grating is formed integrated with the substrate, at the other side of the substrate, one pair or more of fibers are disposed through which either light goes from the vertical diffraction grating or light comes into the vertical diffraction grating, and a lens member is disposed between the fibers and the vertical diffraction grating. At the other side of the substrate, positioning means which positions a plurality of fibers is formed integrated with the substrate, and a space between the vertical diffraction grating and the fibers constitutes a waveguide.
摘要:
The invention provides a capacitive micro sensor that suppresses electric noise generated around the electrodes and enhances the S/N ratio to thereby enhance the detection sensitivity. The gyroscope of the invention includes a tuning fork having three legs, driving electrodes and detecting electrodes provided on two glass substrates, driving field-throughs that supply the driving electrodes with a drive signal, and detecting fields-through that extract a detecting signal from the detecting electrodes. And, a shield member between the detecting and the driving, shield members between the detecting and the detecting, and shield members between the driving and the driving are provided, which makes electrostatic shielding between the adjacent field-throughs of the areas where the driving field-throughs and the detecting field-throughs are arrayed.
摘要:
In a microactuator, a fixed substrate and a movable substrate are placed to be spaced opposed to each other. Between these substrates, a plurality of actuators are arranged to provide different moving distances. The actuators include comb-like movable electrodes formed on the movable substrate, and fixed electrodes formed on the fixed substrate, and having a plurality of teeth that extend outside the leading ends of the teeth of the movable electrodes in an undriven state. The movable substrate is allowed to move so that the leading ends of the teeth of the movable electrodes reach the outer ends of the teeth of the fixed electrodes. The portions of the fixed electrode teeth, which extend outside the movable electrode teeth, are different in length among the actuators.
摘要:
An alignment layer for use in liquid crystals including a macromolecular material deposited on a glass substrate, the macromolecular material composed of main molecular chains which are, on the average, aligned in a first direction. A series of parallel microgrooves are formed in the macromolecular material and aligned perpendicular to the first direction, each microgroove being separated by a ridge having a triangular cross-section, and each ridge having first and second sides meeting at an apex, wherein the first side has a shorter length than the second side. As a result, disclination does not occur and sufficient reliability against external forces and heat may be obtained. In addition, numerous methods are disclosed for forming the alignment layer.
摘要:
A glass substrate has a pair of main surfaces opposite to each other. Two island-shaped portions made of silicon are buried in the glass substrate. The two island-shaped portions are exposed from the two main surfaces of the glass substrate, respectively. An electrode is formed on one main surface of the glass substrate so as to be electrically connected to one exposed portion of one island-shaped portion, and another electrode is formed thereon so as to be electrically connected to one exposed portion of the other island-shaped portion. Still another electrode is formed on the other main surface of the glass substrate so as to be electrically connected to the other exposed portion of the one island-shaped portion. A silicon substrate having a pressure sensing diaphragm is bonded to the other main surface of the glass substrate.
摘要:
A pressure sensor includes a silicon-on-insulator (SOI) substrate, a glass substrate bonded to the SOI substrate by anode bonding, a silicon island formed on a part of a silicon layer of the SOI substrate and surrounded by a groove extending to an insulating layer of the SOI substrate, a through hole formed in the glass substrate, and an output electrode that is made of a conductive material, is disposed inside the through hole, and is electrically connected to an electrode formed on the glass substrate via the silicon island.
摘要:
A glass substrate has a pair of main surfaces opposite to each other. Two island-shaped portions made of silicon are buried in the glass substrate. The tow island-shaped portions are exposed from the two main surfaces of the glass substrate, respectively. An electrode is formed on one main surface of the glass substrate so as to be electrically connected to one exposed portion of one island-shaped portion, and another electrode is formed thereon so as to be electrically connected to one exposed portion of the other island-shaped portion. Still another electrode is formed on the other main surface of the glass substrate so as to be electrically connected to the other exposed portion of the one island-shaped portion. A silicon substrate having a pressure sensing diaphragm is bonded to the other main surface of the glass substrate.
摘要:
A gyroscope of the invention is provided with a tuning fork having three legs and a support, a top side glass substrate and a bottom side glass substrate between which the tuning fork is interposed, driving movable electrodes disposed on the top surface of each leg, driving fixed electrodes disposed on the bottom surface of the top side glass substrate so as to face to the driving movable electrodes, six detection movable electrodes connected to each other in parallel disposed on the top surface of the free end of each leg, and six detection fixed electrodes connected to each other in parallel disposed on the bottom surface of the top side glass substrate so as to face to the detection movable electrodes.