发明申请
- 专利标题： Method and apparatus for automatically detecting and correcting misalignment of a semiconductor chip
- 专利标题（中）： 用于自动检测和校正半导体芯片的未对准的方法和装置
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申请号： US11437456申请日： 2006-05-19
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公开(公告)号： US20070266557A1公开(公告)日： 2007-11-22
- 发明人: Robert J. Drost , Ronald Ho , David C. Douglas
- 申请人： Robert J. Drost , Ronald Ho , David C. Douglas
- 主分类号： H05K3/30
- IPC分类号： H05K3/30 ; G06F19/00
摘要：
One embodiment of the present invention provides a system that automatically detects and corrects a misalignment of a semiconductor chip. During operation, the system uses a position-detection mechanism integrated with the chip to determine the misalignment of the chip from a desired alignment for the chip. Next, the system uses an actuation mechanism integrated with the chip to automatically correct the misalignment, thereby improving performance and reliability of the chip.