发明申请
US20070266928A1 Method of growing group III nitride crystal, group III nitride crystal grown thereby, group III nitride crystal growing apparatus and semiconductor device 有权
生长III族氮化物晶体,由此生长的III族氮化物晶体,III族氮化物晶体生长装置和半导体器件的方法

  • 专利标题: Method of growing group III nitride crystal, group III nitride crystal grown thereby, group III nitride crystal growing apparatus and semiconductor device
  • 专利标题(中): 生长III族氮化物晶体,由此生长的III族氮化物晶体,III族氮化物晶体生长装置和半导体器件的方法
  • 申请号: US11878125
    申请日: 2007-07-20
  • 公开(公告)号: US20070266928A1
    公开(公告)日: 2007-11-22
  • 发明人: Hirokazu IwataSeiji SarayamaHisanori YamaneMasahiko ShimadaMasato Aoki
  • 申请人: Hirokazu IwataSeiji SarayamaHisanori YamaneMasahiko ShimadaMasato Aoki
  • 优先权: JP2003-019716 20030129; JP2003-071302 20030317; JP2003-081836 20030325; JP2004-011536 20040120; JP2004-012906 20040121; JP2004-013562 20040121
  • 主分类号: C30B1/04
  • IPC分类号: C30B1/04
Method of growing group III nitride crystal, group III nitride crystal grown thereby, group III nitride crystal growing apparatus and semiconductor device
摘要:
A method of growing a group III nitride crystal grows a group III nitride crystal from a solution in which an alkaline metal, a group III metal and nitrogen are dissolved, and includes, in the solution, a material which increases solubility of the nitrogen into the solution.
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