发明申请
US20070272992A1 Method for fabricating condenser microphone and condenser microphone
有权
制造电容式麦克风和电容麦克风的方法
- 专利标题: Method for fabricating condenser microphone and condenser microphone
- 专利标题(中): 制造电容式麦克风和电容麦克风的方法
-
申请号: US11702531申请日: 2007-02-06
-
公开(公告)号: US20070272992A1公开(公告)日: 2007-11-29
- 发明人: Mitsuyoshi Mori , Keisuke Tanaka , Takumi Yamaguchi , Takuma Katayama
- 申请人: Mitsuyoshi Mori , Keisuke Tanaka , Takumi Yamaguchi , Takuma Katayama
- 优先权: JP2006-092354 20060329
- 主分类号: H01L29/84
- IPC分类号: H01L29/84 ; H01L21/768
摘要:
A first semiconductor chip includes a fixed electrode formed on a first semiconductor substrate and a plurality of first metal spacers formed on a first interlayer dielectric. A second semiconductor chip includes a vibrating electrode formed on a second semiconductor substrate and a plurality of second metal spacers formed on a second interlayer dielectric. The first and second semiconductor chips are metallically bonded to each other using the first and second metal spacers. An air gap is formed in a region of the condenser microphone located between the first semiconductor chip and the second semiconductor chip except bonded regions of the first and second metal spacers.
公开/授权文献
信息查询
IPC分类: