Method for fabricating condenser microphone and condenser microphone
    1.
    发明申请
    Method for fabricating condenser microphone and condenser microphone 有权
    制造电容式麦克风和电容麦克风的方法

    公开(公告)号:US20070272992A1

    公开(公告)日:2007-11-29

    申请号:US11702531

    申请日:2007-02-06

    IPC分类号: H01L29/84 H01L21/768

    摘要: A first semiconductor chip includes a fixed electrode formed on a first semiconductor substrate and a plurality of first metal spacers formed on a first interlayer dielectric. A second semiconductor chip includes a vibrating electrode formed on a second semiconductor substrate and a plurality of second metal spacers formed on a second interlayer dielectric. The first and second semiconductor chips are metallically bonded to each other using the first and second metal spacers. An air gap is formed in a region of the condenser microphone located between the first semiconductor chip and the second semiconductor chip except bonded regions of the first and second metal spacers.

    摘要翻译: 第一半导体芯片包括形成在第一半导体衬底上的固定电极和形成在第一层间电介质上的多个第一金属间隔物。 第二半导体芯片包括形成在第二半导体衬底上的振动电极和形成在第二层间电介质上的多个第二金属间隔物。 第一和第二半导体芯片使用第一和第二金属间隔物彼此金属结合。 在位于第一半导体芯片和第二半导体芯片之间的电容式麦克风的区域中形成气隙,除了第一和第二金属间隔物的接合区域之外。

    Method for fabricating condenser microphone and condenser microphone
    2.
    发明授权
    Method for fabricating condenser microphone and condenser microphone 有权
    制造电容式麦克风和电容麦克风的方法

    公开(公告)号:US07569906B2

    公开(公告)日:2009-08-04

    申请号:US11702531

    申请日:2007-02-06

    IPC分类号: H01L29/00 H01L29/84

    摘要: A first semiconductor chip includes a fixed electrode formed on a first semiconductor substrate and a plurality of first metal spacers formed on a first interlayer dielectric. A second semiconductor chip includes a vibrating electrode formed on a second semiconductor substrate and a plurality of second metal spacers formed on a second interlayer dielectric. The first and second semiconductor chips are metallically bonded to each other using the first and second metal spacers. An air gap is formed in a region of the condenser microphone located between the first semiconductor chip and the second semiconductor chip except bonded regions of the first and second metal spacers.

    摘要翻译: 第一半导体芯片包括形成在第一半导体衬底上的固定电极和形成在第一层间电介质上的多个第一金属间隔物。 第二半导体芯片包括形成在第二半导体衬底上的振动电极和形成在第二层间电介质上的多个第二金属间隔物。 第一和第二半导体芯片使用第一和第二金属间隔物彼此金属结合。 在位于第一半导体芯片和第二半导体芯片之间的电容式麦克风的区域中形成气隙,除了第一和第二金属间隔物的接合区域之外。

    Semiconductor device and method for fabricating the same
    3.
    发明申请
    Semiconductor device and method for fabricating the same 审中-公开
    半导体装置及其制造方法

    公开(公告)号:US20070128758A1

    公开(公告)日:2007-06-07

    申请号:US11605292

    申请日:2006-11-29

    IPC分类号: H01L21/00 H01L29/82

    摘要: A semiconductor device has, on a single substrate, a semiconductor circuit portion and a hollow capacitor portion including a pair of counter electrodes and a hollow part located between the counter electrodes. The hollow part of the hollow capacitor portion is surrounded by an insulating film, and a through hole is formed in the insulating film to communicate with the hollow part. The top surface of the insulating film covering the hollow part is planarized. Part of the insulating film located to the lateral sides of the hollow part supports the other part thereof located on the hollow part and upper one of the counter electrodes.

    摘要翻译: 半导体器件在单个衬底上具有包括一对对电极和位于对置电极之间的中空部分的半导体电路部分和中空电容器部分。 中空电容器部分的中空部分被绝缘膜包围,并且在绝缘膜中形成通孔以与中空部分连通。 覆盖中空部分的绝缘膜的顶表面被平坦化。 位于中空部分的侧面的绝缘膜的一部分支撑位于中空部分上的另一部分和对置电极的上部之一。

    Manufacturing method of solid-state imaging device, solid-state imaging device, and camera
    4.
    发明申请
    Manufacturing method of solid-state imaging device, solid-state imaging device, and camera 审中-公开
    固态成像装置,固态成像装置和相机的制造方法

    公开(公告)号:US20070122935A1

    公开(公告)日:2007-05-31

    申请号:US11602179

    申请日:2006-11-21

    IPC分类号: H01L21/00

    摘要: A manufacturing method of a solid-state imaging device prevents generation of a space due to insufficient filling of a conductive material. Materials constituting a multilayer film 41 are sequentially deposited on a semiconductor substrate, and portions respectively included in a plug formation intended region and a surrounding region that surrounds the plug formation intended region are removed from the deposited multilayer film 41. Next, the plug formation intended region and the surrounding region from which the portions have been removed is refilled with a single insulating material, and a hole is formed on the plug formation intended region by etching. Then, the formed hole is filled with a conductive material to therefore form a plug.

    摘要翻译: 固态成像装置的制造方法防止由于导电材料的填充不充分而产生空间。 构成多层膜41的材料依次沉积在半导体衬底上,并且从沉积的多层膜41中去除分别包含在插塞形成预期区域中的部分和围绕插塞形成区域的周围区域。 接下来,使用单个绝缘材料重新填充已经去除了部分的插塞形成预期区域和周围区域,并且通过蚀刻在插塞形成预期区域上形成孔。 然后,形成的孔填充有导电材料,从而形成插头。

    Track-dependent data randomization mitigating false VFO detection
    6.
    发明授权
    Track-dependent data randomization mitigating false VFO detection 有权
    跟踪依赖的数据随机化减轻虚假的VFO检测

    公开(公告)号:US08405925B2

    公开(公告)日:2013-03-26

    申请号:US13149905

    申请日:2011-06-01

    IPC分类号: G11B5/09

    摘要: A method for randomizing data to mitigate false VFO detection is described. In one embodiment, such a method includes simultaneously receiving multiple input data streams. Each input data stream is associated with a different track on a magnetic tape medium. The input data streams are simultaneously scrambled to produce multiple randomized data streams. The input data streams are scrambled such that different bit patterns are produced in the randomized data streams even where corresponding bit patterns in the input data streams are identical. The randomized data streams are simultaneously written to their associated data tracks on the magnetic tape medium. A corresponding apparatus is also described.

    摘要翻译: 描述用于随机化数据以减轻虚假VFO检测的方法。 在一个实施例中,这种方法包括同时接收多个输入数据流。 每个输入数据流与磁带介质上的不同轨道相关联。 输入数据流被同时加扰以产生多个随机数据流。 输入数据流被加扰,使得在随机数据流中产生不同的位模式,即使输入数据流中相应的位模式是相同的。 随机数据流被同时写入到磁带介质上的相关联的数据轨道上。 还描述了相应的装置。

    DETERMINATION METHOD, CONTROL METHOD, DETERMINATION APPARATUS, PATTERN FORMING SYSTEM AND PROGRAM
    7.
    发明申请
    DETERMINATION METHOD, CONTROL METHOD, DETERMINATION APPARATUS, PATTERN FORMING SYSTEM AND PROGRAM 有权
    确定方法,控制方法,确定装置,图案形成系统和程序

    公开(公告)号:US20120249986A1

    公开(公告)日:2012-10-04

    申请号:US13430905

    申请日:2012-03-27

    IPC分类号: G03B27/52

    摘要: A determination method, a control method, a determination apparatus, a pattern forming system, and a storage medium can determine a replacement time of a focus ring accurately and quickly. The determination method is capable of determining the replacement time of a focus ring that surrounds a substrate to increase uniformity of a pattern in a surface of the substrate when the pattern is formed by etching a film on the substrate. The determination method includes measuring a shape or a critical dimension of the pattern; and determining the replacement time of the focus ring based on the measured shape or the measured critical dimension of the pattern.

    摘要翻译: 确定方法,控制方法,确定装置,图案形成系统和存储介质可以准确且快速地确定对焦环的更换时间。 确定方法能够确定围绕衬底的聚焦环的更换时间,以通过在衬底上蚀刻膜形成图案来增加衬底表面中的图案的均匀性。 确定方法包括测量图案的形状或临界尺寸; 以及基于测量的形状或所测量的图案的临界尺寸来确定聚焦环的替换时间。

    TAPE LAYOUT DESIGN FOR RELIABLE ECC DECODING
    8.
    发明申请
    TAPE LAYOUT DESIGN FOR RELIABLE ECC DECODING 有权
    用于可靠的ECC解码的卷带布局设计

    公开(公告)号:US20120033321A1

    公开(公告)日:2012-02-09

    申请号:US12849720

    申请日:2010-08-03

    IPC分类号: G11B5/09 H03M13/00

    摘要: A method for physically laying out data on tape is disclosed herein. In one embodiment, such a method includes receiving a data set, wherein the data set includes S sub data sets (SDSs) of fixed size and each SDS includes N codeword interleaves (CWIs). The method further distributes the CWIs for the S SDSs across T tracks on a physical tape medium such that the distances between CWIs of the same SDS are substantially maximized on the physical tape medium. To maximize the distances, the method periodically rotates the tracks within the data set by a track rotation value R, wherein the number of tracks T is equal to 2k, and the track rotation value R is equal to 2k−1−1. A corresponding apparatus is also disclosed herein.

    摘要翻译: 本文公开了一种在带上物理布置数据的方法。 在一个实施例中,这种方法包括接收数据集,其中数据集包括固定大小的S个子数据集(SDS),并且每个SDS包括N个码字交织(CWI)。 该方法进一步在物理磁带介质上跨T磁道分配用于S SDS的CWI,使得相同SDS上的CWI之间的距离在物理磁带介质上基本上最大化。 为了最大化距离,该方法通过轨道旋转值R周期性地旋转数据集内的轨道,其中轨道数量T等于2k,轨道旋转值R等于2k-1-1。 本文还公开了相应的装置。