Invention Application
US20070272992A1 Method for fabricating condenser microphone and condenser microphone
有权
制造电容式麦克风和电容麦克风的方法
- Patent Title: Method for fabricating condenser microphone and condenser microphone
- Patent Title (中): 制造电容式麦克风和电容麦克风的方法
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Application No.: US11702531Application Date: 2007-02-06
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Publication No.: US20070272992A1Publication Date: 2007-11-29
- Inventor: Mitsuyoshi Mori , Keisuke Tanaka , Takumi Yamaguchi , Takuma Katayama
- Applicant: Mitsuyoshi Mori , Keisuke Tanaka , Takumi Yamaguchi , Takuma Katayama
- Priority: JP2006-092354 20060329
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/768

Abstract:
A first semiconductor chip includes a fixed electrode formed on a first semiconductor substrate and a plurality of first metal spacers formed on a first interlayer dielectric. A second semiconductor chip includes a vibrating electrode formed on a second semiconductor substrate and a plurality of second metal spacers formed on a second interlayer dielectric. The first and second semiconductor chips are metallically bonded to each other using the first and second metal spacers. An air gap is formed in a region of the condenser microphone located between the first semiconductor chip and the second semiconductor chip except bonded regions of the first and second metal spacers.
Public/Granted literature
- US07569906B2 Method for fabricating condenser microphone and condenser microphone Public/Granted day:2009-08-04
Information query
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