发明申请
US20070279078A1 Kelvin contact measurement device and kelvin contact measurement method
审中-公开
开尔文接触式测量装置和开尔文接触式测量方法
- 专利标题： Kelvin contact measurement device and kelvin contact measurement method
- 专利标题（中）： 开尔文接触式测量装置和开尔文接触式测量方法
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申请号： US11785297申请日： 2007-04-17
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公开(公告)号： US20070279078A1公开(公告)日： 2007-12-06
- 发明人: Tsutomu Iwami
- 申请人： Tsutomu Iwami
- 申请人地址： JP KANAGAWA
- 专利权人： NEC ELECTRONICS CORPORATION
- 当前专利权人： NEC ELECTRONICS CORPORATION
- 当前专利权人地址： JP KANAGAWA
- 优先权： JP2006-115691 20060419
- 主分类号： G01R1/073
- IPC分类号： G01R1/073 ; G01R31/02
摘要：
Stable Kelvin contact is made upon positional deviation of object. Force pins 12a and sense pins 12b contact with each ball terminal 51 of object 50 for measuring electric property. Force pins 12a and sense pins 12b are extendable and contractable and urged to ball terminal 51 by elastic member 13. Four force and sense pins correspond to one ball terminal. At least one force pin 12a and at least one sense pin 12b are arranged to come into contact with the one ball terminal 51. The object is positioned in concave portion 21 of lower socket 20. Force and sense pins are elastically supported by frame 11 of upper socket 10.