发明申请
- 专利标题： High Current Density Particle Beam System
- 专利标题（中）： 高电流密度粒子束系统
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申请号： US10593246申请日： 2005-02-17
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公开(公告)号： US20070284536A1公开(公告)日： 2007-12-13
- 发明人: Juergen Frosien
- 申请人： Juergen Frosien
- 优先权： EP04006692.0 20040319
- 国际申请： PCT/EP05/01637 WO 20050217
- 主分类号： H01J37/09
- IPC分类号： H01J37/09 ; H01J37/10 ; H01J37/147
摘要：
The present invention relates to charged particle beam devices. The devices comprise an emitter for emitting charged particles; an aperture arrangement with at least two apertures for separating the emitted charged particles into at least two independent charged particle beams; and an objective lens for focusing the at least two independent charged particle beams, whereby the independent charged particle beams are focused onto the same location within the focal plane.
公开/授权文献
- US07663102B2 High current density particle beam system 公开/授权日：2010-02-16
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