发明申请
- 专利标题: ORGANIC THIN-FILM TRANSISTOR, METHOD OF MANUFACTURING SAME AND EQUIPMENT FOR MANUFACTURING SAME
- 专利标题(中): 有机薄膜晶体管及其制造方法及其制造设备
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申请号: US11748567申请日: 2007-05-15
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公开(公告)号: US20070284571A1公开(公告)日: 2007-12-13
- 发明人: Akira Doi , Tomohiro Inoue , Masahiko Ando , Masakazu Kishi
- 申请人: Akira Doi , Tomohiro Inoue , Masahiko Ando , Masakazu Kishi
- 优先权: JP2006-137220 20060517
- 主分类号: H01L29/08
- IPC分类号: H01L29/08 ; H01L35/24 ; H01L51/00
摘要:
An organic thin-film transistor (TFT) with a large carrier mobility includes a drain electrode, a source electrode, which are made of different materials, and a semiconductor layer formed on upper surface of a substrate. Equipment for manufacturing the organic TFT comprises a substrate mounting unit, a painting unit, a light irradiating unit, a sealed container for housing the above units, and a gas supplying unit of an antioxidant gas to the sealed container. The organic TFT to be manufactured is placed on the substrate mounting unit and a semiconductor layer is formed by using the painting unit. The painted semiconductor layer is dried with a light by using the light irradiating unit. When the light with substantially uniform wavelength is irradiated to the drain and the source electrodes, a temperature gradient is caused in the semiconductor layer. Accordingly, an organic TFT with a large carrier mobility can be manufactured.
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