发明申请
US20070289356A1 Fluid sensor including an error detection device 有权
流体传感器包括错误检测装置

Fluid sensor including an error detection device
摘要:
A fluid sensor may be used for detecting fluid media, in particular hydrogen. The fluid sensor includes a sensor chip having a chip surface, which has a measuring surface and a body surface. Printed conductors of a central sensor circuit having at least one heating element and at least one temperature sensor are provided on the measuring surface. Furthermore, the fluid sensor has one additional fracture detection element and one fracture detection circuit situated on the sensor chip. The fracture detection circuit is designed for detecting fractures and/or cracks in and/or on the sensor chip, in particular in the area of a boundary between the measuring surface and body surface.
公开/授权文献
信息查询
0/0