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发明申请
US20070289361A1 Method and apparatus for measurement of the thickness of thin layers by means of a measurement probe 有权
通过测量探头测量薄层厚度的方法和装置

  • 专利标题： Method and apparatus for measurement of the thickness of thin layers by means of a measurement probe
  • 专利标题（中）： 通过测量探头测量薄层厚度的方法和装置
  • 申请号： US11803703
    申请日： 2007-05-15
  • 公开(公告)号： US20070289361A1
    公开(公告)日： 2007-12-20
  • 发明人: Helmut Fischer
  • 申请人： Helmut Fischer
  • 优先权： DE102006022882.0 20060515
  • 主分类号： G01B13/06
  • IPC分类号： G01B13/06
Method and apparatus for measurement of the thickness of thin layers by means of a measurement probe
摘要：
The invention relates to a method and an apparatus for measurement of the thickness of thin layers by means of a measurement probe (11) which has a housing (14) which holds at least one sensor element (17) whose longitudinal axis lies parallel to or on a longitudinal axis (16) of the housing (14), in which at least during the measurement process, a gaseous medium is supplied to a supply opening (21) of the measurement probe (11) on a measurement surface (28), and is supplied via at least one connection channel (24), which is connected to the supply opening (21), to one or more outlet openings (26) which are provided on an end face (29), pointing towards the measurement surface (28), of the measurement probe (11), and in which at least one mass flow, which flows out of one or more outlet openings (26), of the gaseous medium is directed at the measurement surface (28), and in which the measurement probe (11) is held in a non-contacting manner with respect to the measurement surface (28) during the measurement process.
摘要（中）：

本发明涉及一种用于通过测量探头（11）测量薄层厚度的方法和装置，所述测量探针具有壳体（14），该壳体保持至少一个传感器元件（17），所述传感器元件的纵轴线平行于 在所述壳体（14）的纵轴（16）上，至少在测量过程期间，在测量表面（28）上向所述测量探针（11）的供应开口（21）供应气态介质， 并经由连接到供应开口（21）的至少一个连接通道（24）供应到设置在端面（29）上的一个或多个出口开口（26），该端面指向测量表面 28），其中从所述气体介质的一个或多个出口（26）流出的至少一个质量流指向所述测量表面（28），并且其中 测量探头（11）以非接触方式保持 在测量过程中测量表面（28）。

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