发明申请
- 专利标题: PROTECT DIODES FOR HYBRID-ORIENTATION SUBSTRATE STRUCTURES
- 专利标题(中): 用于混合基底结构的保护二极管
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申请号: US11849489申请日: 2007-09-04
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公开(公告)号: US20070293025A1公开(公告)日: 2007-12-20
- 发明人: James Adkisson , Jeffrey Gambino , Alain Loiseau , Kirk Peterson
- 申请人: James Adkisson , Jeffrey Gambino , Alain Loiseau , Kirk Peterson
- 主分类号: H01L21/04
- IPC分类号: H01L21/04
摘要:
A semiconductor structure fabrication method. First, a semiconductor structure is provided including (a) a semiconductor block having a first semiconductor material doped with a first doping polarity and having a first lattice orientation, and (b) a semiconductor region on the semiconductor block, wherein the semiconductor region is physically isolated from the semiconductor block by a dielectric region, and wherein the semiconductor region includes a second semiconductor material (i) doped with a second doping polarity opposite to the first doping polarity and (ii) having a second lattice orientation different from the first lattice orientation. Next, first and second gate stacks are formed on the semiconductor block and the semiconductor region, respectively. Then, (i) first and second S/D regions are simultaneously formed in the semiconductor block on opposing sides of the first gate stack and (ii) first and second discharge prevention semiconductor regions in the semiconductor block.
公开/授权文献
- US07687340B2 Protect diodes for hybrid-orientation substrate structures 公开/授权日:2010-03-30
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