发明申请
- 专利标题: Gas Barrier Transparent Resin Substrate Method for Manufacturing Thereof, and Flexible Display Element Using Barrier Transparent Resin Substrate
- 专利标题(中): 气体屏蔽透明树脂基板制造方法和使用屏障透明树脂基板的柔性显示元件
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申请号: US11665942申请日: 2004-10-22
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公开(公告)号: US20080000388A1公开(公告)日: 2008-01-03
- 发明人: Yoshiyuki Abe
- 申请人: Yoshiyuki Abe
- 国际申请: PCT/JP04/15744 WO 20041022
- 主分类号: C23C14/08
- IPC分类号: C23C14/08
摘要:
The object of this invention is to provide a transparent plastic substrate having better surface smoothness than prior substrates, as well as having high transparency and high gas-barrier characteristics, and to provide a flexible display element using that uses this substrate. For that purpose, a gas-barrier transparent plastic substrate is obtained such that a transparent oxide film comprising either of a tin-oxide amorphous film, or tin-oxide amorphous film containing at least one added element that is selected from among the group of silicon, germanium, aluminum, cerium and indium, at a ratio of 0.2 to 45 atomic % with respect to the total of added element and tin, is formed as gas-barrier layer on at least one surface of a plastic film base material. It is possible that the gas-barrier transparent plastic substrate be formed as bilayer where a silicon-oxide film or silicon-oxynitride film is formed on the transparent oxide film. When a transparent electrode film is further formed on it, a flexible display element can be obtained.
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