发明申请
- 专利标题: Sulfonate-Containing Anti-Reflective Coating Forming Composition for Lithography
- 专利标题(中): 含磺酸盐的防反射涂料组合物用于光刻
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申请号: US11666080申请日: 2005-10-25
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公开(公告)号: US20080003524A1公开(公告)日: 2008-01-03
- 发明人: Takahiro Kishioka , Tadashi Hatanaka , Shigeo Kimura
- 申请人: Takahiro Kishioka , Tadashi Hatanaka , Shigeo Kimura
- 申请人地址: JP CHIYODA-KU, TOKYO 101-0054
- 专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人地址: JP CHIYODA-KU, TOKYO 101-0054
- 优先权: JP2004-318132 20041101
- 国际申请: PCT/JP05/19612 WO 20051025
- 主分类号: G03F7/11
- IPC分类号: G03F7/11 ; C08G59/14 ; H01L21/027
摘要:
There is provided an anti-reflective coating forming composition for lithography comprising a polymer compound, a crosslinking compound, a crosslinking catalyst, a sulfonate compound and a solvent. The anti-reflective coating obtained from the composition has a high preventive effect for reflected light causes no intermixing with photoresists, has a higher dry etching rate compared with photoresists, can form a photoresist pattern having no footing at the lower part, and can use in lithography process by use of a light such as ArF excimer laser beam and F2 excimer laser beam, etc.
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