发明申请
US20080003524A1 Sulfonate-Containing Anti-Reflective Coating Forming Composition for Lithography 有权
含磺酸盐的防反射涂料组合物用于光刻

Sulfonate-Containing Anti-Reflective Coating Forming Composition for Lithography
摘要:
There is provided an anti-reflective coating forming composition for lithography comprising a polymer compound, a crosslinking compound, a crosslinking catalyst, a sulfonate compound and a solvent. The anti-reflective coating obtained from the composition has a high preventive effect for reflected light causes no intermixing with photoresists, has a higher dry etching rate compared with photoresists, can form a photoresist pattern having no footing at the lower part, and can use in lithography process by use of a light such as ArF excimer laser beam and F2 excimer laser beam, etc.
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