发明申请
- 专利标题： Support structure for free-standing MEMS device and methods for forming the same
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申请号： US11476998申请日： 2006-06-28
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公开(公告)号： US20080003710A1公开(公告)日： 2008-01-03
- 发明人: Lior Kogut , Ming-Hau Tung , Brian Arbuckle
- 申请人： Lior Kogut , Ming-Hau Tung , Brian Arbuckle
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first material. The deformable layer is mechanically coupled to the functional layer at a junction. The functional layer and the deformable layer have substantially equal internal stresses at the junction.
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